Design, fabrication and testing of a silicon-on-insulator (SOI) MEMS parallel kinematics XY stage

Journal of Micromechanics and Microengineering

Volumn 17, Issue 6, 2007, Pages 1154-1161

  Dong, Jingyan ^a   Mukhopadhyay, Deepkishore ^a   Ferreira, Placid M ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); KINEMATICS; MEMS; MICROMACHINING; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT;

MONOLITHIC MICRO POSITIONING; PARALLEL KINEMATICS MECHANISM (PKM); TRUSS-LIKE STRUCTURE; XY DIRECTIONS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 34249718527     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/6/008     Document Type: Article

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