Polymeric thermal microactuator with embedded silicon skeleton: Part II- Fabrication, characterization, and application for 2-DOF microgripper

Journal of Microelectromechanical Systems

Volumn 17, Issue 4, 2008, Pages 823-831

  Chu Duc, Trinh ^a,b   Lau, Gih Keong ^c,d   Sarro, Pasqualina M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b VIETNAM NATIONAL UNIVERSITY   (Viet Nam)

^c DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^d NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

2 D microgripper; Electrothermal microactuator; Polymeric microactuator; SU8

Indexed keywords

ACTUATORS; ALUMINA; ALUMINUM; CANTILEVER BEAMS; ETCHING; GRIPPERS; LIGHT METALS; MICROACTUATORS; NONMETALS; OPTICAL DESIGN; POLYMERS; REACTIVE SPUTTERING; SILICON;

2-D MICROGRIPPER; ALUMINUM SPUTTERING; DEEP REACTIVE ION ETCHING; DRIVING VOLTAGES; ELECTRO THERMAL MICRO ACTUATORS; ELECTROTHERMAL MICROACTUATOR; FORWARD MOTION; IN-PLANE; KOH ETCHING; LOW OPERATING TEMPERATURE; LOW-POWER CONSUMPTION; MICRO GRIPPERS; POLYMERIC MICROACTUATOR; SILICON SKELETON; SU8;

REACTIVE ION ETCHING;

EID: 49149109194     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.924275     Document Type: Article

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