Electrothermoelastic modeling of MEMS gripper

Microsystem Technologies

Volumn 15, Issue 4, 2009, Pages 637-646

  Mayyas, Mohammad ^a   Stephanou, Harry ^a  

^a UNIVERSITY OF TEXAS AT ARLINGTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; MEMS; MICROELECTROMECHANICAL DEVICES;

DEVICE LAYERS; FABRICATION TECHNOLOGIES; FINITE-ELEMENT ANALYSIS; HEAT EQUATIONS; IDENTIFICATION MODELS; LINE SHAPES; MICRO BEAMS; MICRO ELECTRO MECHANICALS; MICROGRIPPER; NON-PARAMETRIC; SILICON ON INSULATORS; STEADY STATE; THERMAL BOUNDARY CONDITIONS; THERMAL MODELING;

GRIPPERS;

EID: 58849155491     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0752-7     Document Type: Article

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