Topology optimized design, microfabrication and characterization of electro-thermally driven microgripper

Journal of Intelligent Material Systems and Structures

Volumn 20, Issue 6, 2009, Pages 669-681

  Rubio, Wilfredo M ^a   Silva, Emilio C N ^a   Bordatchev, Evgueni V ^b   Zeman, Marco J F ^b  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

Finite element modeling; Laser microfabrication; Micro electro mechanical systems; Microgripper; Performance characterization; Topology optimization

Indexed keywords

FINITE ELEMENT METHOD; GRIPPERS; HEAT CONVECTION; MECHANICAL PROPERTIES; MEMS; MICROANALYSIS; MICROFABRICATION; RIGID STRUCTURES; SHAPE OPTIMIZATION; TOPOLOGY;

CONVECTIVE HEAT TRANSFER; ELECTRO-THERMALLY DRIVEN; LASER MICRO-FABRICATION; MICRO ELECTRO MECHANICAL SYSTEM; MICROGRIPPER; PERFORMANCE CHARACTERIZATION; SPATIAL FILTERING TECHNIQUES; THERMAL BOUNDARY CONDITIONS;

CHARACTERIZATION;

EID: 63849138399     PISSN: 1045389X     EISSN: 15308138     Source Type: Journal    
DOI: 10.1177/1045389X08093548     Document Type: Article

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