Microelectromechanical systems (MEMS): Fabrication, design and applications

Smart Materials and Structures

Volumn 10, Issue 6, 2001, Pages 1115-1134

  Judy, J W ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; INTEGRATED CIRCUITS; MICROMACHINING; MICROMETERS; SPACE APPLICATIONS;

TRANSDUCTION MECHANISMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035689377     PISSN: 09641726     EISSN: None     Source Type: Journal    
DOI: 10.1088/0964-1726/10/6/301     Document Type: Article

References (117)

1. Impact of MEMS technology on society
2. Subcritical crack growth in silicon MEMS
3. M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures
4. A micro strain gauge with mechanical amplifier
5. A simple technique for the determination of mechanical strain in thin films with applications to polysilicon
6. Mechanical properties of fine grained polysilicon - The repeatability issue
7. Fracture strength of doped and undoped polysilicon
8. In situ phosphorus-doped polysilicon for integrated MEMS
9. MEMS for fluidic controls
10. CFD-ACE+MEMS: A CAD system for simulation and modeling of MEMS
11. Simulation and design of microsystems: A 10-year perspective
12. A sensor classification scheme
13. There's plenty of room at the bottom
14. The resonant gate transistor
15. Silicon as a mechanical material
16. Infinitesimal machinery
17. Resonant-microbridge vapor sensor
18. IC-processed electrostatic micromotors
19. IC-processed electrostatic synchronous micromotors
20. Micromotor fabrication
21. Microfabricated hinges
22. Surface micromachining for microelectro-mechanical systems
23. Silicon fusion bonding and deep reactive ion etching; A new technology for microstructures
24. Milli-scale polysilicon structures
25. Silicon fusion bonding for fabrication of sensors, actuators, and microstructures
26. Field assisted glass-metal sealing
27. Wafer-to-wafer transfer of microstructures for vacuum packaging
28. Fabrication of microcomponents using adhesive bonding techniques
29. Fabrication of microstructures using the LIGA process
30. SU-8: A low-cost negative resist for MEMS
31. Soft lithography
32. Rapid prototyping of microfluidic switches in poly(dimethyl siloxane) and their actuation by electro-osmotic flow
33. Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer
34. Application of chemical-mechanical polishing to planarization of surface-micromachined devices
35. Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines
36. Dry release for surface micromachining with HF vapor-phase etching
37. Integrated movable micromechanical structures for sensors and actuators
38. Surface-micro-machined gear trains driven by an on-chip electrostatic microengine
39. Micromachining for optical and optoelectronic systems
40. Measurement of micromotor dynamics in lubricating fluids
41. Self-assembled monolayer films as durable anti-stiction coatings for polysilicon microstructures
42. Piezoresistance effect of silicon
43. Electronics for micromachined inertial sensors
44. An ultraminiature solid-state pressure sensor for a cardiovascular catheter
45. Fabrication technology for an integrated surface-micromachined sensor
46. A review of magnetic sensors
47. Magnetoresistive sensors
48. Review of fluxgate sensors
49. The fluxgate magnetometer
50. Heterodyne detection of alternating magnetic fields with a resonating xylophone bar magnetometer
51. Integrated uncooled infrared detector imaging arrays
52. 512*512 infrared scene projector array for low-background simulations
53. Array-based vapor sensing using chemically sensitive, carbon black-polymer resistors
54. MEMS chemical gas sensor using a polymer-based array
55. 2 gas sensors: A status report
56. A silicon-based ultrasonic immunoassay for detection of breast cancer antigens
57. Recent advances in amperometric glucose biosensors for in vivo monitoring
58. Sensors of biological organisms - Biological transducers
59. Plasma-etched neural probes
60. Solid-state microsensors for cortical nerve recordings
61. Silicon-substrate micro-electrode arrays for parallel recording of neural activity in peripheral and cranial nerves
62. A large-deflection electrostatic actuator for optical switching applications
63. Laterally driven polysilicon resonant microstructures
64. Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS
65. Thermo-magnetic metal flexure actuators
66. Vacuum-deposited TiNi shape memory film: Characterization and applications in microdevices
67. A practical microgripper by fine alignment, eutectic bonding and SMA actuation
68. A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coils
69. A first functional current excited planar rotational magnetic micromotor
70. Magnetic microactuation of polysilicon flexure structures
71. Magnetic microactuation of torsional polysilicon structures
72. Magnetically actuated, addressable microstructures
73. Silicon-based ultrasonic surgical actuators
74. Wireless integrated microsensors
75. Next century challenges: Mobile networking for smart dust
76. Microfluidic systems for clinical diagnostics
77. μ-TAS: Miniaturized total chemical analysis systems
78. Ultra-high speed DNA fragment separations using microfabricated capillary array electrophoresis chips
79. DNA amplification with a microfabricated reaction chamber
80. A bi-directional silicon micropump
81. Silicon membrane nanofilters from sacrificial oxide removal
82. Hierarchical design and test of integrated microsystems
83. Converting MEMS technology into profits
84. MEMS applications in space exploration
85. Radiation response of a MEMS accelerometer: An electrostatic force