Extending the traveling range with a cascade electrostatic comb-drive actuator

Journal of Micromechanics and Microengineering

Volumn 18, Issue 1, 2008, Pages

  Chiou, Jin Chern ^a   Lin, Yung Jiun ^a   Kuo, Chin Fu ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CASCADE CONNECTIONS; CIRCUIT SIMULATION; CMOS INTEGRATED CIRCUITS; MATHEMATICAL MODELS; MICROMACHINING; POLYSILICON; SPRINGS (COMPONENTS);

COMB-DRIVE ACTUATORS; SIDE STABILITY; SUSPENDED SPRINGS; TRAVELING RANGE;

ELECTROSTATIC ACTUATORS;

EID: 41849095966     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/1/015018     Document Type: Article

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