-
1
-
-
0033096840
-
Analysis and design of polysilicon thermal flexure actuator
-
Comtois J H and Bright V M 1999 Analysis and design of polysilicon thermal flexure actuator J. Micromech. Microeng. 9 64-70
-
(1999)
J. Micromech. Microeng.
, vol.9
, Issue.1
, pp. 64-70
-
-
Comtois, J.H.1
Bright, V.M.2
-
2
-
-
0343022405
-
Thermally actuated optical microscanner with large angle and low consumption
-
Schweizer S, Calmes S, Laudon M and Renaud P 1999 Thermally actuated optical microscanner with large angle and low consumption Sensors Actuators A 76 470-7
-
(1999)
Sensors Actuators
, vol.76
, pp. 470-477
-
-
Schweizer, S.1
Calmes, S.2
Laudon, M.3
Renaud, P.4
-
4
-
-
0031683832
-
Progress and trends in ink-jet printing technology
-
Le H P 1998 Progress and trends in ink-jet printing technology J. Imaging Sci. Technol. 42 49-62
-
(1998)
J. Imaging Sci. Technol.
, vol.42
, pp. 49-62
-
-
Le, H.P.1
-
5
-
-
33746323427
-
Rapid heating of ink jet printer heads is measured
-
Bernard L 1996 Rapid heating of ink jet printer heads is measured Cornell Chronicle 28
-
(1996)
Cornell Chronicle
, vol.28
-
-
Bernard, L.1
-
6
-
-
27644561741
-
A bulk-micromachined bistable relay with u-shaped thermal actuators
-
Qiu J, Lang J H, Slocum A H and Weber A C 2005 A bulk-micromachined bistable relay with u-shaped thermal actuators J. Microelectromech. Syst. 14 1099-108
-
(2005)
J. Microelectromech. Syst.
, vol.14
, Issue.5
, pp. 1099-1108
-
-
Qiu, J.1
Lang, J.H.2
Slocum, A.H.3
Weber, A.C.4
-
7
-
-
15844379906
-
A study of creep in polysilicon MEMS devices
-
Tuck K, Jungen A, Geisberger A, Ellis M and Skidmore G 2005 A study of creep in polysilicon MEMS devices J. Eng. Mater. Technol. 127 90-6
-
(2005)
J. Eng. Mater. Technol.
, vol.127
, Issue.1
, pp. 90-96
-
-
Tuck, K.1
Jungen, A.2
Geisberger, A.3
Ellis, M.4
Skidmore, G.5
-
8
-
-
24144482735
-
An electro-thermal bimorph-based microactuator for precise track-positioning of optical disk drives
-
Yang J P, Deng X C and Chong T C 2005 An electro-thermal bimorph-based microactuator for precise track-positioning of optical disk drives J. Micromech. Microeng. 15 958-65
-
(2005)
J. Micromech. Microeng.
, vol.15
, Issue.5
, pp. 958-965
-
-
Yang, J.P.1
Deng, X.C.2
Chong, T.C.3
-
9
-
-
0038444573
-
Local synthesis of silicon nanowires and carbon nanotubes on microbridges
-
Englander O, Christensen D and Lin L 2003 Local synthesis of silicon nanowires and carbon nanotubes on microbridges Appl. Phys. Lett. 82 4797-9
-
(2003)
Appl. Phys. Lett.
, vol.82
, Issue.26
, pp. 4797-4799
-
-
Englander, O.1
Christensen, D.2
Lin, L.3
-
10
-
-
27544514481
-
Localized and CMOS compatible growth of carbon nanotubes on a 3 x 3 squaremicron microheater spot
-
Jungen A, Stampfer C, Tonteling M, Sarangi D and Hierold C 2005 Localized and CMOS compatible growth of carbon nanotubes on a 3 x 3 squaremicron microheater spot Digest of Technical Papers. TRANSDUCERS '05, 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems vol 1 (Seoul: IEEE) pp 93-6
-
(2005)
Digest of Technical Papers. TRANSDUCERS '05, 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems
, vol.1
, pp. 93-96
-
-
Jungen, A.1
Stampfer, C.2
Tonteling, M.3
Sarangi, D.4
Hierold, C.5
-
11
-
-
18144402047
-
Electric-field assisted growth and self-assembly of intrinsic silicon nanowires
-
Englander O, Christensen D, Kim J, Lin L and Morris S J S 2005 Electric-field assisted growth and self-assembly of intrinsic silicon nanowires Nano Lett. 5 705-8
-
(2005)
Nano Lett.
, vol.5
, pp. 705-708
-
-
Englander, O.1
Christensen, D.2
Kim, J.3
Lin, L.4
Morris, S.J.S.5
-
12
-
-
31144442532
-
Room-temperature chemical vapor deposition and mass detection on a heated atomic force microscope cantilever
-
Sunden E O, Wright T L, Lee J, King W P and Graham S 2006 Room-temperature chemical vapor deposition and mass detection on a heated atomic force microscope cantilever Appl. Phys. Lett. 88 033107
-
(2006)
Appl. Phys. Lett.
, vol.88
-
-
Sunden, E.O.1
Wright, T.L.2
Lee, J.3
King, W.P.4
Graham, S.5
-
14
-
-
0033096840
-
Analysis and design of polysilicon thermal flexure actuator
-
Huang Q A and Lees N K S 1999 Analysis and design of polysilicon thermal flexure actuator J. Micromech. Microeng. 9 64-70
-
(1999)
J. Micromech. Microeng.
, vol.9
, Issue.1
, pp. 64-70
-
-
Huang, Q.A.1
Lees, N.K.S.2
-
16
-
-
33646700253
-
Thermography on a suspended microbridge using confocal Raman scattering
-
Jungen A, Stampfer C and Hierold C 2006 Thermography on a suspended microbridge using confocal Raman scattering Appl. Phys. Lett. 88 191901
-
(2006)
Appl. Phys. Lett.
, vol.88
-
-
Jungen, A.1
Stampfer, C.2
Hierold, C.3
-
19
-
-
0032138470
-
Surface micromachining for microelectromechanical systems
-
Bustillo J M, Howe R T and Muller R S 1998 Surface micromachining for microelectromechanical systems Proc. IEEE 86 1552-74
-
(1998)
Proc. IEEE
, vol.86
, Issue.8
, pp. 1552-1574
-
-
Bustillo, J.M.1
Howe, R.T.2
Muller, R.S.3
-
20
-
-
0031142859
-
Test structures to measure the Seebeck coefficient of CMOS IC polysilicon
-
von Arx M, Paul O and Baltes H 1997 Test structures to measure the Seebeck coefficient of CMOS IC polysilicon IEEE Trans. Semicond. Manuf. 10 201-8
-
(1997)
IEEE Trans. Semicond. Manuf.
, vol.10
, Issue.2
, pp. 201-208
-
-
Von Arx, M.1
Paul, O.2
Baltes, H.3
-
21
-
-
0037201864
-
Modeling the thermal behavior of a surface-micromachined linear-displacement thermomechanical microactuator
-
Lott C D, McLain T W, Harb J N and Howell L L 2002 Modeling the thermal behavior of a surface-micromachined linear-displacement thermomechanical microactuator Sensors Actuators A 101 239-50
-
(2002)
Sensors Actuators
, vol.101
, pp. 239-250
-
-
Lott, C.D.1
McLain, T.W.2
Harb, J.N.3
Howell, L.L.4
-
24
-
-
84949748281
-
Improvements of on-membrane method for thin-film thermal conductivity and emissivity measurements
-
Jacquot A et al 2002 Improvements of on-membrane method for thin-film thermal conductivity and emissivity measurements 21st Int. Conf. on Thermoelectrics, 2002 Proc. ICT '02 (San José, CA) (Piscataway, NJ: IEEE) pp 353-6
-
(2002)
21st Int. Conf. on Thermoelectrics, 2002 Proc. ICT '02
, pp. 353-356
-
-
Jacquot, A.1
Al, E.2
-
26
-
-
0032002225
-
Temperature-dependent emissivity of silicon-related materials and structures
-
Chen W et al 1998 Temperature-dependent emissivity of silicon-related materials and structures IEEE Trans. Semicond. Manuf. 11 30-9
-
(1998)
IEEE Trans. Semicond. Manuf.
, vol.11
, Issue.1
, pp. 30-39
-
-
Chen, W.1
Al, E.2
-
27
-
-
0030182958
-
Electrothermal responses of lineshape microstructures
-
Lin L and Chiao M 1996 Electrothermal responses of lineshape microstructures Sensors Actuators A 55 35-41
-
(1996)
Sensors Actuators
, vol.55
, pp. 35-41
-
-
Lin, L.1
Chiao, M.2
-
28
-
-
0033875285
-
A simple approach to characterizing the driving force of polysilicon laterally driven thermal microactuators
-
Huang Q A and Lee N K S 2000 A simple approach to characterizing the driving force of polysilicon laterally driven thermal microactuators Sensors Actuators A 80 267-72
-
(2000)
Sensors Actuators
, vol.80
, pp. 267-272
-
-
Huang, Q.A.1
Lee, N.K.S.2
-
29
-
-
33645777254
-
Spatially resolved temperature mapping of electrothermal actuators by surface Raman scattering
-
Kearney S P, Phinney L M and Baker M S 2006 Spatially resolved temperature mapping of electrothermal actuators by surface Raman scattering J. Microelectromech. Syst. 15 314-21
-
(2006)
J. Microelectromech. Syst.
, vol.15
, Issue.2
, pp. 314-321
-
-
Kearney, S.P.1
Phinney, L.M.2
Baker, M.S.3
-
30
-
-
34249890027
-
Anharmonic effects in light-scattering due to optical phonons in silicon
-
Balkanski M, Wallis R F and Haro E 1983 Anharmonic effects in light-scattering due to optical phonons in silicon Phys. Rev. B 28 1928-34
-
(1983)
Phys. Rev.
, vol.28
, Issue.4
, pp. 1928-1934
-
-
Balkanski, M.1
Wallis, R.F.2
Haro, E.3
-
31
-
-
0041922530
-
Combining high resolution and tensorial analysis in Raman stress measurements of silicon
-
Bonera E, Fanciulli M and Batchelder D N 2003 Combining high resolution and tensorial analysis in Raman stress measurements of silicon J. Appl. Phys. 94 2729
-
(2003)
J. Appl. Phys.
, vol.94
, Issue.4
, pp. 2729
-
-
Bonera, E.1
Fanciulli, M.2
Batchelder, D.N.3
-
32
-
-
0035424690
-
The investigation of microsystems using Raman spectroscopy
-
De Wolf I, Jian C and van Spengen W M 2001 The investigation of microsystems using Raman spectroscopy Opt. Lasers Eng. 36 213-23
-
(2001)
Opt. Lasers Eng.
, vol.36
, Issue.2
, pp. 213-223
-
-
De Wolf, I.1
Jian, C.2
Van Spengen, W.M.3
-
33
-
-
18744371222
-
-
von Arx M 1998 Thermal properties of CMOS thin films PhD Thesis ETH Zurich
-
(1998)
PhD Thesis
-
-
Von Arx, M.1
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