Modeling and analysis of a 2-DOF bidirectional electro-thermal microactuator

Microsystem Technologies

Volumn 15, Issue 5, 2009, Pages 713-722

  Elbuken, Caglar ^a   Topaloglu, Nezih ^a   Nieva, Patricia M ^a   Yavuz, Mustafa ^a   Huissoon, Jan P ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BI-DIRECTIONAL MOTIONS; ELECTRO-THERMAL ACTUATORS; ELECTRO-THERMAL MICROACTUATORS; FINITE ELEMENT SIMULATIONS; GEOMETRICAL PARAMETERS; HIGHER DEGREES; IN PLANES; INPUT VOLTAGES; LUMPED MODELS; MEMS APPLICATIONS; MODELING AND ANALYSIS; OUT-OF-PLANE DEFLECTIONS; OUT-OF-PLANE MOTIONS; THEORETICAL PREDICTIONS; THERMO-MECHANICAL ANALYSIS;

MICROACTUATORS;

EID: 62249157750     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-0789-2     Document Type: Article

References (23)

1. A Atre 2006 Analysis of out-of-plane thermal microactuators J Micromech Microeng 16 2 205 213
2. Burns DM, Bright VM (1997) Design and performance of a double hot arm polysilicon thermal actuator. In: Proc SPIE int soc opt eng. Austin, TX, USA, pp 296-306
3. A Cao J Kim L Lin 2007 Bi-directional electrothermal electromagnetic actuators J Micromech Microeng 17 5 975 982
4. Carter J, Cowen A, Hardy B, Mahadevan R, Stonefield M, Wilcenski S (2005) POLYMUMPs design handbook revision v11.0. http://www.memscap.com/mumps/ documents, mEMSCAP Inc.
5. WC Chen CC Chu J Hsieh W Fang 2003 A reliable single-layer out-of-plane micromachined thermal actuator Sens Actuators A Phys A103 48 58
6. L Chronis LP Lee 2005 Electrothermally activated SU-8 microgripper for single cell manipulation in solution J Microelectromech Syst 4 14 857 863
7. JH Comtois VM Bright 1997 Applications for surface-micromachined polysilicon thermal actuators and arrays Sens Actuators A Phys A58 19 25
8. Comtois CH, Bright VM, Phipps MW (1995) Thermal microactuators for surface-micromachining processes. In: Proc SPIE int soc opt eng. Austin, TX, USA, pp 10-21
9. Cowan WD, Bright VM (1997) Vertical thermal actuators for micro-opto-electro-mechanical systems. In: Proc SPIE int soc opt eng. Austin, TX, USA, pp 127-146
10. S Deladi G Krijnen MC Elwenspoek 2004 Parallel-beams/lever electrothermal out-of-plane actuator Microsyst Technol 10 393 399
11. Elms DG (1970) Linear elastic analysis. B. T. Batsford Ltd, London
12. J Fraser T Hubbard M Kujath 2006 Theoretical and experimental analysis of an off-chip microgripper Can J Electr Comput Eng 31 77 81
13. Guckel H, Klein J, Christenson T, Skrobis K, Laudon M, Lovell EG (1992) Thermo-magnetic metal flexure actuators. In: IEEE solid-state sensor and actuator workshop, New York, NY, USA, pp 73-75
14. QA Huang NKS Lee 1999 Analysis and design of polysilicon thermal flexure actuator J Micromech Microeng 9 1 64 70
15. P Lerch CK Slimane B Romanowicz P Renaud 1996 Modelization and characterization of asymmetrical thermal micro-actuators J Micromech Microeng 6 1 134 137
16. Liao KM, Chueh CC, Chen R (2002) A novel electro-thermally driven bi-directional microactuator. In: Proc 2002 intal symp on micromechatronics and human science, Nagoya, Japan, pp 267-274
17. L Lin M Chiao 1996 Electrothermal responses of lineshape microstructures Sens Actuators A Phys A55 35 41
18. Pai M, Tien NC (1999) Operating principles of an electrothermal vibrometer for optical switching applications. In: Proc SPIE int soc opt eng, Santa Clara, CA, USA, pp 124-130
19. CH Pan CL Chang YK Chen 2005 Design and fabrication of an electro-thermal microactuator with multidirectional in-plane motion J Microlithogr Microfabr Microsyst 4 1 15
20. R Venditti JSH Lee Y Sun D Li 2006 An in-plane, bi-directional electrothermal MEMS actuator J Micromech Microeng 16 10 2067 2070
21. CT Wu W Hsu 2002 An electro-thermally driven microactuator with two dimensional motion Microsyst Technol 8 47 50
22. D Yan A Khajepour R Mansour 2003 Modeling of two-hot-arm horizontal thermal actuator J Micromech Microeng 13 2 312 322
23. D Yan A Khajepour R Mansour 2004 Design and modeling of a MEMS bidirectional vertical thermal actuator J Micromech Microeng 14 7 841 850