Application of MEMS force sensors for in situ mechanical characterization of nano-scale thin films in SEM and TEM

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 239-245

  Haque, M A ^a   Saif, M T A ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

MEMS force sensor; Tensile testing; Thin film properties

Indexed keywords

ELASTIC MODULI; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY; STRAIN HARDENING; STRAIN MEASUREMENT; TENSILE TESTING; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; YIELD STRESS;

FORCE SENSORS; NANOSCALE THIN FILMS;

MICROSENSORS;

EID: 0036544276     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00861-5     Document Type: Conference Paper

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