Finite element modelling and experimental characterization of an electro-thermally actuated silicon-polymer micro gripper

Journal of Micromechanics and Microengineering

Volumn 18, Issue 6, 2008, Pages

  Krecinic, F ^a   Duc, T Chu ^a   Lau, G K ^b   Sarro, P M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; EXPERIMENTS; FINITE ELEMENT METHOD; MANGANESE COMPOUNDS; MICROOPTICS; PHOTORESISTS; POLYMERS; SILICON; THERMAL EXPANSION; THERMAL SPRAYING; TRANSIENT ANALYSIS;

AVERAGE TEMPERATURES; CHARACTERISTIC TIMES; DISPLACEMENT FIELDS; DRIVING VOLTAGES; EXPERIMENTAL CHARACTERIZATIONS; EXPERIMENTAL DATUMS; FINITE ELEMENT ANALYSIS; FINITE ELEMENT MODELLING; FIRST ORDERS; INTEGRATED HEATERS; MICRO ACTUATORS; PLANE BENDING; POLYMER ACTUATORS; SILICON SKELETONS; SIMULATED FORCES; TRANSIENT MEASUREMENTS; TRANSIENT THERMAL RESPONSES;

GRIPPERS;

EID: 57249091620     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/6/064007     Document Type: Conference Paper

References (16)

1. Cecil J, Vasquez D and Powell D 2005 A review of gripping and manipulation techniques for micro-assembly applications Int. J. Prod. Res. 43 819-28
2. Haddab Y, Chaillet N and Bourjault A 2000 A microgripper using smart piezoelectric actuators Proc. IEEE/RSJ Int. Conf. on Intelligent Robots and Systems vol 1 pp 659-64
3. Beyeler F, Neild A, Oberti S, Bell D J, Sun Y, Dual J and Nelson B J 2007 Monolithically fabricated microgripper with integrated force sensor for manipulating microobjects and biological cells aligned in an ultrasonic field J. Microelectromech. Sys. 16 7-15
4. Chronis N and Lee L P 2005 Electrothermally activated SU-8 microgripper for single cell manipulation in solution J. Microelectromech. Sys. 14 857-63
5. Wood D, Burdess J S and Harris A J 1998 Actuators and their mechanisms in microengineering Eng. Sci. Educ. J. 7 19-27
6. Chu Duc T, Lau G K, Creemer J F and Sarro P M 2008 Electrothermal microgripper with large jaw displacement and integrated force sensors Proc. 21st IEEE Int. Conf. on MEMS (Tucson, AZ, USA, January 13-17, 2008) pp 519-22
7. Lau G K, Goosen J F L, van Keulen F, Chu Duc T and Sarro P M 2007 A powerful polymeric thermal micro- actuator with embedded silicon microstructure Appl. Phys. Lett. 90 214103
8. Lau G K, Chu Duc T, Goosen J F L, Sarro P M and van Keulen F 2007 In-plane thermal unimorph using confined polymers J. Micromech. Microeng. 17 1-10
9. Lide D R (ed) 2006 Thermal conductivity of metals and semiconductors as a function of temperature CRC Handbook of Chemistry and Physics 87th edn (Boca Raton, FL: Taylor and Francis) internet version p 12.219
10. Incropera F P and DeWitt D P 1996 Thermophysical properties of gases at atmospheric pressure, Appendix A Table A.4 Fundamentals of Heat and Mass Transfer 4th edn (New York: Wiley) p 839
11. Feng R and Farris R J 2002 The characterization of thermal and elastic constants for an epoxy photoresist su8 coating J. Mater. Sci. 37 4793-9
12. Churchill S W and Chu H 1975 Correlating equations for laminar and turbulent free convection from a horizontal cylinder Int. J. Heat Mass Transfer 18 1049-53
13. Mankame N D and Ananthasuresh G K 2001 Comprehensive thermal modelling and characterization of an electro-thermal-compliant microactuator J. Micromech. Microeng. 11 452-62
14. Frederikse P R 2006 Elastic constants of single crystals CRC Handbook of Chemistry and Physics 87th edn (Boca Raton, FL: Taylor and Francis) internet version p 12.77
15. Feng R and Farris R J 2003 Influence of processing conditions on the thermal and mechanical properties of SU8 negative photoresist coatings J. Micromech. Microeng. 13 80-8
16. Namazu T, Inoue S, Takio K, Fujita T, Maenaka K and Koterazawa K 2005 Visco-elastic properties of micron-thick SU-8 polymers measured by two different types of uniaxial tensile tests MEMS 2005, 18th IEEE Int. Conf. pp 447-50