In-plane micro-motion measurement with high accuracy based on computer microvision

Proceedings of the World Congress on Intelligent Control and Automation (WCICA)

Volumn , Issue , 2008, Pages 2236-2240

  Lu, Qinghua ^a   Fan, Yanbin ^a   Zhang, Xianmin ^b  

^a FOSHAN UNIVERSITY   (China)

^b SOUTH CHINA UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Computer microvision; Micro motion measurement; Multiscale; Robust

Indexed keywords

ESTIMATION; INDUSTRIAL ENGINEERING; INTEGRATED CONTROL; INTELLIGENT CONTROL; MOTION ESTIMATION; STRESS INTENSITY FACTORS; WAVE FILTERS;

BASIC PRINCIPLES; COMPUTER MICROVISION; CONTROL AND AUTOMATION; GRADIENT FILTERS; HIERARCHICAL ESTIMATION; HIGH-ACCURACY; IN-PLANE; INTEGRATED APPROACH; MANUFACTURING TECHNOLOGIES; MEASUREMENT ACCURACY; MICRO-MOTION MEASUREMENT; MICRO-POSITIONING; MOTION ESTIMATION ALGORITHMS; MOTION MEASUREMENTS; MULTI SCALING; MULTISCALE; ROBUST;

MEASUREMENTS;

EID: 52149091683     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WCICA.2008.4594473     Document Type: Conference Paper

References (22)

1. Alexander J.A, "Measuring Sound-Induced Motions of the Alligator Lizard Cochlea," PhD thesis, Massachusetts Institute of Technology, Cambridge, MA, 2002.
2. Lu B.H, "Micro/nano manufacturing," Zhenjiang, Jiangsu, China: National Natural Science Foundation of China, 2004. (in Chinese).
3. Wang T, Wang X.D, Wang L.D, et al., "Dynamic testing technology of microstructure in microelectromechanial systems," China Mechanical Engineering, vol.16, no.1, pp.83-88, 2005.
4. Rembe C, Kant R, Muller R.S, "Measurement System for Full Three-Dimensiona Motion Characterization of MEMS," Journal of Microelectromechanical Systems, vol.11, no.5, pp. 479-488, 2002.
5. Lee C.W, Zhang X.M, Tjin S.C, et al, "Nano-scale Displacement Measurement of MEMS Devices Using Fiber Optic Interferometry," Proceedings of SPIE, 2003, pp.196-201.
6. Akram E.J, Gerd G, and Klaus D.H, "Microscopic ESPI: Better fringe quality by the Fourier transform method," Proc. of SPIE 2003, Vol.4933, pp.335-341.
7. Rembe C, Tibken B, Hofer E.P, "Analysis of the Dynamics in Microactuators High-Speed Cine Photomicrography," Journal of Microelectromechanical system, vol.10, no.1, pp. 137-145, 2001.
8. Hemmert W, Mermelstein M.S, Freeman D.M, "Nanometer Resolution of Three Dimen Sional Motions Using Video Interference Microscopy," IEEE International MEMS99, Orlando FL, January 17-21, 1999.
9. Davis C.Q, Freeman D.M, "Using a light microscope to measure motions with nanometer accuracy," Opt. Eng, vol.37, no.4, pp. 1299-1304, 1998.
10. Davis C.Q, "Measuring nanometer, three-dimensional motions with light microscopy," PhD thesis. Massachusetts Institute of Technology, Cambridge, MA, 1997.
11. Liao Q, Zhou Y, Mi L, et al., "The applications of machine vision to precision measurement," Journal of Chongqing University (Natural Science Edition), vol.25, no.6, pp.1-4, 2002. (in Chinese)
12. Horn B K P, "Robot Vision," Cambridge, Mass, New York: MIT Press, 1986.
13. Naresh G, Laveen K, "Gradient based image motion estimation without computing gradients," International Journal of Computer Vision, vol.22, no.1, pp. 81-101, 1997.
14. Davis C.Q, Freeman D.M, "Statistics of subpixel registration algorithms based on spatiotemporal gradients or block matching," Opt. Eng, vol.37, no.4, pp. 1290-1298, 1998.
15. Horn B K P, Weldon Jr E J, "Direct methods for recovering motion," International Journal of Computer Vision, vol.2, pp. 51-76, 1988.
16. Oscar N, David J.H, "Robust muliresolution alignment of MRI brain volumes," Magnetic Resonance in Medicine, vol.43, pp. 705-715, 2000.
17. Holland P.W, Welsch R. E, "Robust regression using iteratively reweighted least-squares, " Communications in Statistics: Theory and Methods, A6, pp. :813-827, 1977.
18. Christoph S, Janusz K, "Estimating motion in image sequences," IEEE Signal Processing Magazine,vol.16, pp. 70-91, 1999.
19. Robinson D, Milanfar P, "Bias-minimizing filters for gradient-based image registration," Signal Processing: Image Communication, vol. 20, pp. 554-568, 2005.
20. Barron J L, Fleet D J, Beauchemin S S, "Performance of optical flow techniques," International Journal of Computer Vision, vol.12, pp. 43-77, 1994.
21. Timoner S J, Freeman D.M, "Multi-image gradient-based algorithms for motion estimation," Opt. Eng, vol. 40, no.9, pp. 2003-2016, 2001.
22. Timoner S S J, "Subpixel motion estimation from sequences of video images," MS Thesis, Massachusetts Institute of Technology, Cambridge, 1999.