Bimorph nano actuators synthesized by focused ion beam chemical vapor deposition

Microelectronic Engineering

Volumn 86, Issue 11, 2009, Pages 2364-2368

  Chang, Jiyoung ^a   Min, Byung Kwon ^b   Kim, Jongbaeg ^b   Lin, Liwei ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Yonsei University   (South Korea)

Author keywords

Bimorph; Chemical vapor deposition; Focused ion beam; Nano actuator

Indexed keywords

BIMORPH; DIAMOND LIKE CARBON; FIB-CVD; FOCUSED ION BEAM CHEMICAL VAPOR DEPOSITION; INPUT POWER; MOVING CAPABILITY; NANO ACTUATOR; NANOACTUATORS; SILICON MEMS; TWO LAYERS;

ACTUATORS; BEAM PLASMA INTERACTIONS; DEGRADATION; FOCUSED ION BEAMS; ION BOMBARDMENT; IONS; MEMS; MICROELECTROMECHANICAL DEVICES; TUNGSTEN; VAPORS;

CHEMICAL VAPOR DEPOSITION;

EID: 69649097562     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.04.022     Document Type: Article

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