Millimeter-sized nanomanipulator with sub-nanometer positioning resolution and large force output

Smart Materials and Structures

Volumn 16, Issue 5, 2007, Pages 1742-1750

  Liu, Xinyu ^a   Tong, Jianhua ^a   Sun, Yu ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; CLOSED LOOP CONTROL SYSTEMS; FINITE ELEMENT METHOD; MANIPULATORS; MEMS; MICROACTUATORS; TRANSDUCERS;

ANALYTICAL MODELS; NANOMANIPULATION; NANOMANIPULATORS;

NANOSTRUCTURED MATERIALS;

EID: 34548219055     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/16/5/029     Document Type: Article

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