Nonlinear behaviors of a comb drive actuator under electrically induced tensile and compressive stresses

Journal of Micromechanics and Microengineering

Volumn 17, Issue 3, 2007, Pages 557-566

  Lee, Ki Bang ^a   Pisano, Albert P ^b   Lin, Liwei ^b  

^a KB Lab   (Singapore)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; COMPUTER SIMULATION; CONTROL NONLINEARITIES; MECHANICAL DRIVES; TENSILE STRESS; THERMAL EFFECTS;

COMB DRIVE ACTUATORS; CUBIC STIFFNESS; ELECTRICAL POTENTIAL; JOULE HEATING EFFECTS;

MICROACTUATORS;

EID: 34249048304     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/3/019     Document Type: Article

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