Feedforward Control of Piezoactuators in Atomic Force Microscope Systems: Inversion-based compensation for dynamics and hysteresis

IEEE Control Systems

Volumn 29, Issue 1, 2009, Pages 70-82

  Leang, Kam K ^a   Zou, Qingze ^a   Devasia, Santosh ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 70449695857     PISSN: 1066033X     EISSN: None     Source Type: Journal    
DOI: 10.1109/MCS.2008.930922     Document Type: Article

References (47)

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