메뉴 건너뛰기




Volumn 15, Issue 6, 2005, Pages 1265-1270

Electro-thermally actuated microgrippers with integrated force-feedback

Author keywords

Actuator; Electro thermal; Microgripper; Microtweezer; Thermoelectric

Indexed keywords

ACTUATORS; ALGORITHMS; ATOMIC FORCE MICROSCOPY; CARBON NANOTUBES; ELECTROSTATICS; NANOTECHNOLOGY; OPTIMIZATION;

EID: 18744390483     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/6/018     Document Type: Article
Times cited : (91)

References (17)
  • 1
    • 0001359336 scopus 로고    scopus 로고
    • Tactile microgripper for automated handling of microparts
    • 10.1016/0924-4247(96)80164-6 0924-4247 A
    • Greitmann G and Buser R A 1996 Tactile microgripper for automated handling of microparts Sensors Actuators A 53 410-5
    • (1996) Sensors Actuators , vol.53 , Issue.1-3 , pp. 410-415
    • Greitmann, G.1    Buser, R.A.2
  • 2
    • 0036646820 scopus 로고    scopus 로고
    • Development of tools for handling and assembling microcomponents
    • 0960-1317 315
    • Ansel Y et al 2002 Development of tools for handling and assembling microcomponents J. Micromech. Microeng. 12 430-7
    • (2002) J. Micromech. Microeng. , vol.12 , Issue.4 , pp. 430-437
    • Ansel, Y.1
  • 3
    • 18744416443 scopus 로고    scopus 로고
    • www.zyvex.com
  • 4
    • 37049003117 scopus 로고    scopus 로고
    • Customizable nanotweezers for manipulation of free-standing nanostructures
    • Boggild P et al 2001 Customizable nanotweezers for manipulation of free-standing nanostructures IEEE-NANO 2001 (Piscataway, NJ: IEEE)
    • (2001) IEEE-NANO 2001
    • Boggild, P.1
  • 5
    • 3042606646 scopus 로고    scopus 로고
    • Towards pick-and-place assembly of nanostructures
    • 10.1166/jnn.2004.025 1533-4880
    • Molhave K et al 2004 Towards pick-and-place assembly of nanostructures J. Nanosci. Nanotechnol. 4 279-82
    • (2004) J. Nanosci. Nanotechnol. , vol.4 , Issue.3 , pp. 279-282
    • Molhave, K.1
  • 6
    • 0032787499 scopus 로고    scopus 로고
    • Nanotube nanotweezers
    • 10.1126/science.286.5447.2148 0036-8075
    • Kim P and Lieber C M 1999 Nanotube nanotweezers Science 286 2148-50
    • (1999) Science , vol.286 , Issue.5447 , pp. 2148-2150
    • Kim, P.1    Lieber, C.M.2
  • 7
    • 0035839878 scopus 로고    scopus 로고
    • Nanotweezers consisting of carbon nanotubes operating in an atomic force microscope
    • 10.1063/1.1403275 0003-6951
    • Akita S et al 2001 Nanotweezers consisting of carbon nanotubes operating in an atomic force microscope Appl. Phys. Lett. 79 1691-3
    • (2001) Appl. Phys. Lett. , vol.79 , Issue.11 , pp. 1691-1693
    • Akita, S.1
  • 8
    • 0026883071 scopus 로고
    • Polysilicon microgripper
    • 10.1016/0924-4247(92)80169-4 0924-4247 A
    • Kim C-J et al 1992 Polysilicon microgripper Sensors Actuators A 33 221-7
    • (1992) Sensors Actuators , vol.33 , Issue.3 , pp. 221-227
    • Kim, C.-J.1
  • 9
    • 0037011446 scopus 로고    scopus 로고
    • Single- and double-hot arm asymmetrical polysilicon surface micromachined electrothermal microactuators applied to realize a microengine
    • 10.1016/S0040-6090(02)00811-8 0040-6090
    • Kolesar E S et al 2002 Single- and double-hot arm asymmetrical polysilicon surface micromachined electrothermal microactuators applied to realize a microengine Thin Solid Films 420-421 530-8
    • (2002) Thin Solid Films , vol.420-421 , pp. 530-538
    • Kolesar, E.S.1
  • 10
    • 1542271440 scopus 로고    scopus 로고
    • Micromachine nanoprobe and its application
    • 10.1109/ICSENS.2002.1037232
    • Hashiguchi G and Fujita H 2002 Micromachine nanoprobe and its application Proc. IEEE Sensors 1 922-5
    • (2002) Proc. IEEE Sensors , vol.2 , pp. 922-925
    • Hashiguchi, G.1    Fujita, H.2
  • 12
    • 3042600344 scopus 로고    scopus 로고
    • Micro-electro-mechanical systems microtweezers for the manipulation of bacteria and small particles
    • 10.1063/1.1711143 0034-6748
    • Jericho S K et al 2004 Micro-electro-mechanical systems microtweezers for the manipulation of bacteria and small particles Rev. Sci. Instrum. 75 1280-2
    • (2004) Rev. Sci. Instrum. , vol.75 , Issue.5 , pp. 1280-1282
    • Jericho, S.K.1
  • 13
    • 0033751618 scopus 로고    scopus 로고
    • SMA microgripper with integrated antagonism
    • 10.1016/S0924-4247(99)00385-4 0924-4247 A
    • Kohl M et al 2000 SMA microgripper with integrated antagonism Sensors Actuators A 83 208-13
    • (2000) Sensors Actuators , vol.83 , Issue.1-3 , pp. 208-213
    • Kohl, M.1
  • 14
    • 3142664529 scopus 로고    scopus 로고
    • A polymeric microgripper with integrated thermal actuators
    • 0960-1317 018
    • Nguyen N-T, Ho S-S and Low C L-N 2004 A polymeric microgripper with integrated thermal actuators J. Micromech. Microeng. 14 969
    • (2004) J. Micromech. Microeng. , vol.14 , Issue.7 , pp. 969
    • Nguyen, N.-T.1    Ho, S.-S.2    Low, C.L.-N.3
  • 15
    • 0033742575 scopus 로고    scopus 로고
    • Atomic force microscopy probe with piezoresistive read-out and a highly symmetrical Wheatstone bridge arrangement
    • 10.1016/S0924-4247(00)00299-5 0924-4247 A
    • Thaysen J et al 2000 Atomic force microscopy probe with piezoresistive read-out and a highly symmetrical Wheatstone bridge arrangement Sensors Actuators A 83 47-53
    • (2000) Sensors Actuators , vol.83 , Issue.1-3 , pp. 47-53
    • Thaysen, J.1
  • 16
    • 0037905678 scopus 로고    scopus 로고
    • Piezoresistance and electrical resistivity of Pd, Au, and Cu films
    • 10.1016/S0040-6090(03)00504-2 0040-6090
    • Jen S U et al 2003 Piezoresistance and electrical resistivity of Pd, Au, and Cu films Thin Solid Films 434 316-22
    • (2003) Thin Solid Films , vol.434 , Issue.1-2 , pp. 316-322
    • Jen, S.U.1
  • 17
    • 2542468176 scopus 로고    scopus 로고
    • An approach to a multi-walled carbon nanotube based mass sensor
    • 10.1016/j.mee.2004.03.032 0167-9317
    • Mateiu R et al 2004 An approach to a multi-walled carbon nanotube based mass sensor Microelectron. Eng. 73-74 670-4
    • (2004) Microelectron. Eng. , vol.73-74 , pp. 670-674
    • Mateiu, R.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.