MEMS-based integrated head/actuator/slider for hard disk drives

IEEE/ASME Transactions on Mechatronics

Volumn 3, Issue 3, 1998, Pages 166-174

  Imamura, Takahiro ^a   Katayama, Masaki ^a   Ikegawa, Yukinori ^a   Ohwe, Takeshi ^a   Koishi, Ryosuke ^a   Koshikawa, Takao ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

Electrostatic actuator; Hard disk drive; Head slider; Microactuator

Indexed keywords

ELECTROSTATIC DEVICES; HARD DISK STORAGE; MAGNETIC HEADS; MECHATRONICS; MICROACTUATORS; MICROMACHINING;

ELECTROSTATIC MICROACTUATORS; HARD DISK DRIVES; HEAD SLIDERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032164972     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/3516.712112     Document Type: Article

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