Optimization of an electro-thermally and laterally driven microactuator

Microsystem Technologies

Volumn 9, Issue 5, 2003, Pages 331-334

  Lee, C C ^a   Hsu, W ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; FINITE ELEMENT METHOD; OPTIMIZATION; PERFORMANCE; POLYSILICON; SEMICONDUCTOR DEVICE STRUCTURES;

ELECTRO-THERMAL MICROACTUATOR; PAN AND HSU DESIGN; THERMAL BOUNDARY CONDITION;

MICROACTUATORS;

EID: 0038346498     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-002-0253-z     Document Type: Article

References (6)

1. Comtois JH; Bright VM (1997) Applications for surface-micromachined polysilicon thermal actuators and arrays. Sensors and Actuators A58: 19-25
2. Comtois JH; Michalicek MA; Barron CC (1998) Electrothermal actuators fabricated in four-level planarized surface micromachined polycrystalline silicon. Sensors and Actuators A70: 23-31
3. Guckel H; Klein J; Christen T; Skrobis K; Landon M; Lovell EG (1992) Thermo-magnetic metal flexure actuators. Technical Digest, IEEE Solid State Sensor and Actuator Workshop, Hilton Head Island, SC 73-75
4. Huang Q; Lee NKS (1999) Analysis and design of polysilicon thermal flexure actuator. J Micromech Microeng 9: 64-70
5. Koester D; Mahedevan R; Marcus K (1994) Multi-User MEMS Processes (MUMPs) Introduction and Design Rules. Rev. 3. MCNC MEMS Technology Applications Center, Research Triangle Park, NC, USA
6. Pan CS; Hsu W (1997) An electro-thermally and laterally driven polysilicon microactuator. J Micromech Microeng 7: 7-13