Materials selection for microfabricated electrostatic actuators

Sensors and Actuators, A: Physical

Volumn 102, Issue 3, 2003, Pages 279-285

  Srikar, V T ^a   Spearing, S M ^a  

^a Massachusetts Institute of Technology   (United States)

Author keywords

Actuation speed; Actuation voltage; Design; Electrostatic actuators; Materials selection; Reliability

Indexed keywords

DAMPING; ELASTIC MODULI; ELECTRIC CONDUCTIVITY; ELECTRIC POTENTIAL; MICROELECTROMECHANICAL DEVICES; SPEED; STICTION;

ACTUATION VOLTAGE; MATERIALS SELECTION; MICROFABRICATED ELECTROSTATIC ACTUATORS;

ACTUATORS;

EID: 0037238656     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00393-X     Document Type: Article

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