Actuators for micropositioners and nanopositioners

Applied Mechanics Reviews

Volumn 59, Issue 1-6, 2006, Pages 324-334

  Hubbard, Neal B ^a   Culpepper, Martin L ^b   Howell, Larry L ^c  

^a Integrated Systems   (United States)

^b Massachusetts Institute of Technology   (United States)

^c Brigham Young University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMICAL MICROACTUATORS; RANGE-TO-RESOLUTION RATIO;

BANDWIDTH; ELECTROSTATICS; MAGNETIC DEVICES; MICROACTUATORS; NATURAL FREQUENCIES; PIEZOELECTRICITY;

ACTUATORS;

EID: 33846360669     PISSN: 00036900     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2345371     Document Type: Review

References (82)

1. Golda, D., and Culpepper, M. L., 2004, "Small-Scale Micro/Nano-Manipulators in Precision Alignment and Positioning," Proc. Am. Soc. Precis Eng., Orlando, FL, Oct., pp. 297-299.
2. Slocum, A. H., 1992, Precision Machine Design, Society of Manufacturing Engineers, Dearborn, MI.
3. Cheung, P., Horowitz, R., and Howe, R. T., 1996, "Design, Fabrication, Position Sensing, and Control of an Electrostatically-Driven Polysilicon Microacluator," IEEE Trans. Magn., 32(1), pp. 122-128.
4. Hirano, T., Fan, L.-S., Gao, J. Q., and Lee, W. Y., 1998, "MEMS Milliactuator for Hard-Disk-Drive Tracking Servo," J. Microelectromech. Syst., 7(2), pp. 149-155.
5. Hirano, T., Fan, L.-S., Lee, W. Y., Hong, J., Imaino, W., Pattanaik, S., Chan, S., Webb, P., Horowitz, R., Aggarwal, S., and Horsley, D. A., 1998, "High-Bandwidth High-Accuracy Rotary Microactuators for Magnetic Hard Disk Drive Tracking Servos," IEEE/ASME Trans. Mechatron., 3(3), pp. 156-165.
6. Hirano, T., Fan, L.-S., Semba, T., Lee, W. Y., Hong, J., Pattanaik, S., Webb, P., Juan, W.-H., and Chan, S., 1999, "High-Bandwidth HDD Tracking Servo by a Moving-Slider Micro-Actuator," IEEE Trans. Magn., 35(5), pp. 3670-3672.
7. Horsley, D. A., Wongkomet, N., Horowitz, R., and Pisano, A. P., 1999. "Precision Positioning Using a Microfabricated Electrostatic Actuator." IEEE Trans. Magn., 35(2), pp. 993-999.
8. Imamura, T., Katayama, M., Ikegawa, Y., Ohwe, T., Koishi, R., and Koshikawa, T., 1998, "MEMS-Based Integrated Head/Actuator/Slider for Hard Disk Drives." IEEE/ASME Trans. Mechatron., 3(3), pp. 166-174.
9. Kim, B.-H., and Chun, K., 2001, "Fabrication of an Electrostatic Track-Following Micro Actuator for Hard Disk Drives Using SOI Wafer," J. Micromech. Microeng., 11(1), pp. 1-6.
10. Soeno, Y., Ichikawa, S., Tsuna, T., Sato, Y., and Sato, I., 1999, "Piezoelectric Piggy-Back Microactuator for Hard Disk Drive," IEEE Trans. Magn., 35(2), pp. 983-987.
11. Toshiyoshi, H., Mita, M., and Fujita, H., 2002, "A MEMS Piggyback Actuator for Hard-Disk Drives," J. Microelectromech. Syst., 11(6), pp. 648-654.
12. Wang, Z. H., Zhu, W. G., and Yao, X., 2002, "d(31) Type Inplane Bending Multilayer Piezoelectric Microactuators - A Design Concept and Its Applications," Sens. Actuators, A, A101(3), pp. 262-268.
13. Cusin, P., Sawai, T., and Konishi, S., 2000, "Compact and Precise Positioner Based on the Inchworm Principle," J. Micromech. Microeng., 10(4), pp. 516-521.
14. Gao, P., Tan, H., and Yuan, Z. J., 2000, "The Design and Characterization of Piezo-Driven UltraPrecision Stepping Positioner," Meas. Sci. Technol., 11(2) pp. N15-N19.
15. [IS] Ku, S.-S., Pinsopon, U., Cetinkunt, S., and Nakajima, S., 2000, "Design, Fabrication, and Real-Time Neural Network Control of a Three-Degrees-of-Freedom Nanopositioner," IEEE/ASME Trans. Mechatron., 5(3), pp. 273-280.
16. Gao, P., and Swei, S.-M., 1999, "A Six-Degree-of-Freedom Micro-Manipulator Based on Piezoelectric Translators," Nanotechnology, 10(4), pp. 447-452.
17. Jonsmann, J., Sigmund, O., and Bouwstra, S., 1999, "Compliant Electro-Thermal Microactuators," Proc. IEEE Micro Electro Mech. Syst., pp. 588-593.
18. Jung, K. S., and Baek, Y. S., 2002, "Contact-Free Moving-Magnet Type of Micropositioner With Optimized Specification," IEEE Trans. Magn., 38(3), pp. 1539-1548.
19. Kwon, H. N., and Lee, J. H., 2002, "Characterization of a Micromachined Inchworm Motor With Thermoelastic Linkage Actuators, Proc. IEEE Micro Electro Mech. Syst., pp. 586-589.
20. Liu, Y.-T., and Higuchi, T., 2001, "Precision Positioning Device Utilizing Impact Force of Combined Piezo-Pneumatic Actuator," IEEE/ASME Trans. Mechatron., 6(4), pp. 467-473.
21. Sun, Y., Piyabongkam, D., Sezen, A., Nelson, B. J., and Rajamani, R., 2002, "A High-Aspect-Ratio Two-Axis Electrostatic Microactuator With Extended Travel Range," Sens. Actuators, A, A102(1-2), pp. 49-60.
22. z, Piezo-Micropositioner Part I: Design and Analysis," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 46(4), pp. 897-905.
23. z: Piezo-Micropositioner Part II: Experiment and Performance," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 46(4), pp. 906-912.
24. Lee, C.-W., and Kim, S.-W., 1997, "An Ultraprecision Stage for Alignment of Wafers in Advanced Microlithography," Precis. Eng., 21(2-3), pp. 113-122.
25. Liu, H. Z., Lu, B. H., Ding, Y. C., Tang, Y. P., and Li, D. C., 2003, "A Motor-Piezo Actuator for Nano-Scale Positioning Based on Dual Servo Loop and Nonlinearity Compensation," J. Micromech. Microeng., 13(2), pp. 295-299.
26. ∞ Controller for a 2-DOF Magnetic Micro-Levitation Positioner," Proc. Am. Control, Conf., Vol. 3, pp. 3219-3223.
27. Pahk, H. J., Lee, D. S., and Park, J. H., 2001, "Ultra Precision Positioning System for Servo Motor-Piezo Actuator Using the Dual Servo Loop and Digital Filter Implementation," Int. J. Mach. Tools Manuf., 41(1), pp. 51-63.
28. Yang, R., Jouaneh, M., and Schweizer, R., 1996, "Design and Characterization of a Low-Profile Micropositioning Stage," Precis. Eng., 18(1), pp. 20-29.
29. Ni, J., and Zhu, Z., 2000, "Design of a Linear Piezomotor With Ultra-High Stiffness and Nanoprecision," IEEE/ASME Trans. Mechatron., 5(4), pp. 441-443.
30. Zhang, B., and Zhu, Z., 1997, "Developing a Linear Piezomotor With Nanometer Resolution and High Stiffness," IEEE/ASME Trans. Mechatron., 2(1), pp. 22-29.
31. Chang, S. H., and Du, B. C., 1998, "A Precision Piezodriven Micropositioner Mechanism With Large Travel Range," Rev. Sci. Instrum., 69(4), pp. 1785-1791.
32. Scire, F. E., and Teague, E. C., 1978, "Piezodriven 50-μm Range Stage With Subnanometer Resolution," Rev. Sci. Instrum., 49(12), pp. 1735-1740.
33. Jaecklin, V. P., Linder, C., de Rooij, N. F., and Moret, J.-M., 1993, "Comb Actuators for XY-Microstages," Sens. Actuators, A, A39(1), 83-89.
34. Chen, K. S., Trumper, D. L., and Smith, S. T., 2002, "Design and Control for an Electromagnetically Driven X-Y-θ Stage," Precis. Eng., 26(4), pp. 355-369.
35. Judy, J. W., Polla, D. L., and Robbins, W. P., 1990, "A Linear Piezoelectric Stepper Motor With Submicrometer Step Size and Centimeter Travel Range," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 37(5), pp. 428-437.
36. Xu, Y., Miller, S. A., and MacDonald, N. C., 1995, " Microelectromechanical Scanning Tunneling Microscope," Proc. Int. Conf. Solid State Sensors Actuators, Vol. 1, pp. 640-643.
37. Gao, P., Swei, S.-M., and Yuan, Z., 1999, "A New Piezodriven Precision Micropositioning Stage Utilizing Flexure Hinges," Nanotechnology, 10(4), pp. 394-398.
38. Hoen, S., Bai, Q., Harley, J. A., Horsley, D. A., Matta, F., Verhoeven, T., Williams, J., and Williams, K. R., 2003, "A High-Performance Dipole Surface Drive for Large Travel and Force," Proc. Int. Conf. Solid State Sensors Actua tors. Vol. 1, pp. 344-347.
39. Rothuizen, H. Despont, M., Drechsler, U., Genolet, G., Häberle, W., Lutwyche, M., Stutz, R., and Vettiger, P., 2002, "Compact Copper/Epoxy-Based Electromagnetic Scanner for Scanning Probe Applications," Proc. IEEE Micro Electro Mech. Syst., pp. 582-585.
40. Smith, S. T., Chetwynd, D. G., and Harb, S., 1994, "A Simple Two-Axis Ultraprecision Actuator," Rev. Sci. Instrum., 65(4), pp. 910-917.
41. Chu, L. L., and Gianchandani, Y. B., 2003, "A Micromachined 2D Positioner With Electrothermal Actuation and Sub-Nanometer Capacitive Sensing," J. Micromech. Microeng., 13(2), pp. 279-285.
42. Jang, W. I., Choi, C. A., Lee, M. L., Jun, C. H., and Kim, Y. T., 2002, "Fabrication of MEMS Devices by Using Anhydrous HF Gas-Phase Etching With Alcoholic Vapor," J. Micromech. Microeng., 12(3), pp. 297-306.
43. Shen, S.-C., Pan, C.-T., and Chou, H.-P., 2002, "Electromagnetic Optical Switch for Optical Network Communication," J. Magn. Magn. Mater., 239(1-3), pp. 610-613.
44. Chen, S., and Culpepper, M. L., 2004, "Compliant Mechanisms for Micro-Scale Spatial Manipulators: Applications in Nanomanipulation," Proc. Am. Soc. Precis. Eng., Orlando, FL, Oct., pp. 293-296.
45. Culpepper, M. L., and Anderson, G., 2004, "Design of a Low-Cost Nano-Manipulator Which Utilizes a Monolithic, Spatial Compliant Mechanism," Precis. Eng., 28(4), pp. 469-482.
46. Culpepper, M. L., and Chen, S., 2003, "Design of Precision Manipulators Using Binary Actuation and Differential Compliant Mechanisms," Proc. Am. Soc. Precis. Eng. Portland, OR, Oct., pp. 279-282.
47. Reid, P. R., Bright, V. M., and Comtois, J. H., 1996, "Force Measurements of Polysilicon Thermal Microactuators," Proc. SPIE, 2882, pp. 296-306.
48. Manzardo, O., Herzig, H. P., Marxer, C. R., and de Rooij, N. F., 1999, "Miniaturized Time-Scanning Fourier Transform Spectrometer Based on Silicon Technology," Opt. Lett., 24(23), pp. 1705-1707.
49. Syms, R. R. A., 2002, "Long-Travel Electrothermally Driven Resonant Canti-lever Microactuators," J. Micromech. Microeng., 12(3), pp. 211-218.
50. Li, W., Zhao, X., Cai, B., Zhou, G., and Zhang, M., 2001, "Magnetically Actuated MEMS Variable Optical Attenuator," Proc. SPIE, 4601, pp. 89-96.
51. McConaghy, C. F., Lee, A. P., Sommargren, G., Phillion, D., Campbell, E. W., and Trevino, I., 1998, "Micromechanical Actuator With Capacitive Position Correction for Phase Shifting Diffraction Interferometry," Proc. ASME Micro-Electro-Mech. Syst., pp. 461-468.
52. Fan, L., Wu, M. C., Choquette, K. D., and Crawford, M. H., 1997, "Self-Assembled Microactuated XYZ Stages for Optical Scanning and Alignment," Proc. Int. Conf. Solid State Sensors Actuators, Vol. 1, pp. 319-322.
53. Kim, C.-K, and Kim, Y.-K., 2002, "Micro XY-Stage Using Silicon on a Glass Substrate," J. Micromech. Microeng., 12(2), pp. 103-107.
54. Cragun, R., and Howell, L. L., 1999, "Linear Thermomechanical Microactuators," Proc. ASME Micro Electro Mech. Syst., pp. 181-188.
55. Guckel, H., Fischer, K., and Stiers, E., 1998, "Closed Loop Controlled, Large Throw, Magnetic Linear Microactuator With 1000 μm Structural Height," Proc. IEEE Micro Electro Mech. Syst., pp. 414-418.
56. Guckel, H., Klein, J., Christenson, T., Skrobis, K., Laudon, M., and Lovell, E. G., 1992, "Thermomagnetic Metal Flexure Actuators," Technical Digest -IEEE Solid-State Sensor Actuator Workshop, pp. 73-75.
57. Li, J., Brenner, M. P., Lang, I. H., Slocum, A. H., and Struempler, R., 2003, "DRIE-Fabricated Curved-Electrode Zipping Actuators With Low Pull-in Voltage," Proc. Int. Conf. Solid-State Sensors Actuators, Vol. 1, pp. 480-483.
58. Lott, C. D., McLain, T. W., Harb, J. N., and Howell, L. L., 2002, "Modeling the Thermal Behavior of a Surface-Micromachined Linear-Displacement Thermomechanical Microactuator," Sens. Actuators, A, A101(1-2), pp. 239-250.
59. de Bhailis, D., Murray, C., Duffy, M., Alderman, J., Kelly, G., and Mathúna, S. C. O., 2000, "Modelling and Analysis of a Magnetic Microactuator," Sens. Actuators, A, A81(1), pp. 285-289.
60. Neagu, C. R., Gardeniers, J. G. E., Elwenspoek, M., and Kelly, J. J., 1996, "An Electrochemical Microactuator: Principle and First Results," J. Microelectromech. Syst., 5(1), pp. 2-9.
61. Neagu, C. R., Gardeniers, J. G. E., Elwenspoek, M., and Kelly, J. J., 1997, "An Electrochemical Active Valve," Electrochim. Acta, 42(20-22), pp. 3367-3373.
62. Stanczyk, T., Ilic, B., Hesketh, P. I., and Boyd, I. G. I. V., 2000, "A Micro-fabricated Electrochemical Actuator for Large Displacements," J. Microelectromech. Syst., 9(3), pp. 314-320.
63. Madou, M. J., 2002, Fundamentals of Microfabrication: The Science of Miniaturization, 2nd ed., CRC Press, Boca Raton, FL.
64. Maluf, N., 2000, An Introduction to Microelectromechanical Systems Engineering, Artech House, Boston.
65. Jaecklin, V. P., Under, C., de Rooij, N. F., and Moret, J.-M., 1992, "Micromechanical Comb Actuators With Low Driving Voltage," J. Micromech. Microeng., 2(4), pp. 250-255.
66. Lee, C. S. B., Han, S., and MacDonald, N. C., 2000, "Single Crystal Silicon (SCS) XX-Stage Fabricated by DRIE and IR Alignment," Proc. IEEE Micro Electro Mech. Syst., pp. 28-33.
67. Comtois, J. H., Michalicek, M. A., and Barron, C. C., 1997, "Characterization of Electrothermal Actuators and Arrays Fabricated in a Four-Level, Planarized Surface-Micromachined, Polycrystalline Silicon Process," Proc. Int. Conf. Solid State Sensors Actuators, Vol. 2, pp. 769-772.
68. Hubbard, N. B., and Howell, L. L., 2004, "Experimental Repeatability of a Thermal Actuator for Nanopositioning," Proc. ASME Micro Electro Mech. Syst., Paper No. IMECE2004-59616.
69. Oliver, A. D., Vigil, S. R., and Gianchandani, Y. B., 2003, "Photothermal Surface-Micromachined Actuators," IEEE Trans. Electron Devices, 50(4), pp. 1156-1157.
70. Park, J.-S., Chu, L. L., Oliver, A. D., and Gianchandani, Y. B., 2001, "Bent-Beam Electrothermal Actuators - Part II: Linear and Rotary Microengines," J. Microelectromech. Syst., 10(2), pp. 255-262.
71. Que, L., Park, J.-S., and Gianchandani, Y. B., 2001, "Bent-Beam Electrothermal Actuators - Part I: Single Beam and Cascaded Devices," J. Microelectromech. Syst., 10(2), pp. 247-254.
72. Akiyama, T., and Shono, K., 1993, "Controlled Stepwise Motion in Polysilicon Microstructures," J. Microelectromech. Syst., 2(3), pp. 106-110.
73. Fukuta, Y., Collard, D., Akiyama, T., Yang, E. H., and Fujita, H., 1997, "Microactuated Self-Assembling of 3D Polysilicon Structures With Reshaping Technology," Proc. IEEE Micro Electro Mech. Syst., pp. 477-481.
74. Park, J., Keller, S., Carman, G. P., and Hahn, H. T., 2001, "Development of a Compact Displacement Accumulation Actuator Device for Both Large Force and Large Displacement," Sens. Actuators, A, A90(3), pp. 191-202.
75. Ferreira, A., and Fontaine, J.-G., 2001, "Coarse/Fine Motion Control of a Teleoperated Autonomous Piezoelectric Nanopositioner Operating Under a Microscope," Proc. IEEE/ASME Int. Conf. Adv. Intellig. Mechatron. Vol. 2, pp. 1313-1318.
76. Ferreira, A., and Minotti, P., 1997, "Control of a Multidegree of Freedom Standing Wave Ultrasonic Motor Driven Precise Positioning System," Rev. Sci. Instrum., 68(4), pp. 1779-1786.
77. Kladitis, P. E., Bright, V. M., Harsh, K. F., and Lee, Y. E., 1999, "Prototype Microrobots for Micro Positioning in a Manufacturing Process and Micro Unmanned Vehicles," Proc. IEEE Micro Electro Much. Syst., pp. 570-575.
78. Conway, N. Y., and Kim, S.-G., 2004, "Large-Strain, Piezoelectric, In-Plane Micro-Actuator," Proc. IEEE Micro Electro Mech. Syst., pp. 454-457.
79. Hoffmann, M., Leuerer, T., Krüger, C., Böttger, U., Mokwa, W., and Waser, R., 2002, "Fabrication and Characterization of a PZT Thin Film Actuator for a Micro Electromechanical Switch Application," Mater. Res. Soc. Symp. Proc., 688, pp. 145-152.
80. Lagorce, L. K., Brand, O., and Allen, M. G., 1999, "Magnetic Microactuators Based on Polymer Magnets," J. Microelectromech. Syst., 8(1), pp. 2-9.
81. Yi, Y. W., and Liu, C., 1999, "Magnetic Actuation of Hinged Microstructures." J. Microelectromech. Syst., 8(1), pp. 10-17.
82. Franklin, G. F., Powell, J. D., and Emami-Naeini, A., 2002, Feedback Control of Dynamic Systems, 4th ed., Prentice-Hall, Upper Saddle River, NJ.