Multifunctional probe array and local vapor inking chip for scanning probe nanolithography

2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006

Volumn 2, Issue , 2006, Pages 551-554

  Li, Shifeng ^a   Liu, Chang ^a   Wang, Xuefeng ^b  

^a University of Illinois at Urbana Champaign   (United States)

^b GE GLOBAL RESEARCH   (United States)

Author keywords

Scanning probe nanolithography; Surface tension and inking reservoir array; Thermal actuation

Indexed keywords

FUNCTION EVALUATION; NANOLITHOGRAPHY; SURFACE TENSION;

SCANNING PROBE NANOLITHOGRAPHY; THERMAL ACTUATION;

MICROPROCESSOR CHIPS;

EVAPORATION; MICROPROCESSORS; SURFACE TENSION;

EID: 42549101299     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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