Electrostatic micromechanical actuator with extended range of travel

Journal of Microelectromechanical Systems

Volumn 9, Issue 3, 2000, Pages 321-328

  Chan, Edward K ^a,b   Dutton, Robert W ^a  

^a Stanford University   (United States)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTROSTATICS; FEEDBACK CONTROL; MICROACTUATORS; SYSTEM STABILITY;

ELECTROSTATIC MICROMECHANICAL ACTUATORS; RESIDUAL CHARGES;

MICROELECTROMECHANICAL DEVICES;

EID: 0034270553     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.870058     Document Type: Article

References (10)

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10. E. S. Hung, private communication.