On heat transfer at microscale with implications for microactuator design

Journal of Micromechanics and Microengineering

Volumn 19, Issue 4, 2009, Pages

  Ozsun, Ozgur ^a   Alaca, B Erdem ^a   Yalcinkaya, Arda D ^b   Yilmaz, Mehmet ^a,d   Zervas, Michalis ^c   Leblebici, Yusuf ^c  

^a KOÇ UNIVERSITY   (Turkey)

^b BOGAZICI UNIVERSITY   (Turkey)

^c EPFL   (Switzerland)

^d Columbia University ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMMERCIAL SOFTWARE; CONDUCTIVE HEAT TRANSFER; CONSTANT HEAT FLUX; EXPERIMENTAL PROCEDURE; FILM COEFFICIENTS; FINITE ELEMENT SIMULATIONS; FINITE ELEMENT SOFTWARE; FREE CONVECTIONS; HEAT SOURCES; MICRO-SCALE; MICROACTUATOR DESIGN; TEMPERATURE DEPENDENT; THERMAL MICROACTUATORS; THERMAL TIME CONSTANTS; THERMO-MECHANICAL; TIME CONSTANTS;

ATMOSPHERIC PRESSURE; BOUNDARY CONDITIONS; CANTILEVER BEAMS; EMBEDDED SOFTWARE; HEAT TRANSFER COEFFICIENTS; MICROACTUATORS; NATURAL CONVECTION; PRESSURE EFFECTS; RESPIRATORY MECHANICS;

HEAT EXCHANGERS;

EID: 67849097432     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/4/045020     Document Type: Article

References (33)

1. Guckel H, Klein J, Christensen T, Skrobis K, Laudon M and Lovell E G 1992 Thermo-magnetic metal flexure actuators 5th Technical Digest, IEEE Solid-State Sensor and Actuator Workshop (Hilton Head Island, SC, USA, 22-25 June 1992) pp 73
2. Riethmüller W and Benecke W 1988 Thermally excited silicon microactuators IEEE Trans. Electron. Devices 35 758
3. Mayyas M, Zhang P, Lee W H, Shiakolas P and Popa D 2007 Design tradeoffs for electrothermal microgrippers Proc. IEEE Int. Conf. Robotics Automation (Roma, Italy, April 2007) pp 907
4. Eichhorn V, Fatikow S, Wich T, Dahmen C, Sievers T, Nordström Andersen K, Carlson K and Bøggild P 2008 Depth-detection methods for microgripper based CNT manipulation in a scanning electron microscope J. Micro-Nano Mech. 4 27
5. Liu Z, Wei Y, Chan H-Y, Li W J, Dong Z and Wang Y 2004 Structural and thermal analysis of a thermally actuated polymer micro robotic gripper Proc. IEEE Int. Conf. Robotics and Biomimetics (Shenyang, China, August 2004) pp 470
6. Incropera F P and DeWitt D P 2002 Fundamentals of Heat and Mass Transfer (New York: Wiley)
7. ANSYS 10 User Guide
8. Kakac S and Yener Y 1993 Heat Conduction (Washington, DC: Taylor and Francis)
9. Guo Z Y and Li Z X 2003 Size effect on single-phase channel flow and heat transfer at microscale Int. J. Heat Fluid Flow 24 284
10. Baglio S, Castorina L, Fortuna L and Savalli N 2002 Modeling and design of novel photo-thermo-mechanical microactuators Sensors Actuators A 101 185
11. Mankame N D and Ananthasuresh G K 2001 Comprehensive thermal modelling and characterization of an electro-thermal-compliant microactuator J. Micromech. Microeng. 11 452
12. Mills A F 1999 Basic Heat and Mass Transfer (Upper Saddle River, NJ: Prentice-Hall)
13. Jungen A, Pfenninger M, Tonteling M, Stampfer C and Hierold C 2006 Electrothermal effects at the microscale and their consequences on system design J. Micromech. Microeng. 16 1633
14. Chen R S, Kung C and Lee G B 2002 Analysis of the optimal dimension on the electrothermal microactuator J. Micromech. Microeng. 12 291
15. Todd S T and Xie H 2005 Steady-state 1D electrothermal modeling of an electrothermal transducer J. Micromech. Microeng. 15 2264
16. Yang Y J and Yu C C 2004 Extraction of heat-transfer macromodels for MEMS devices J. Micromech. Microeng. 14 587
17. Milanovic V, Bowen E, Zaghloul M E, Tea N H, Suehle J S, Payne B and Gaitan M 2000 Micromachined convective accelerometers in standard integrated circuits technology Appl. Phys. Lett. 76 508
18. Luo X B, Yang Y J, Zheng F, Li Z X and Guo Z Y 2001 An optimized micromachined convective accelerometer with no proof mass J. Micromech. Microeng. 11 504
19. Hickey R, Kujath M and Hubbard T 2002 Heat transfer analysis and optimization of two-beam microelectromechanical thermal actuators J. Vac. Sci. Technol. A 20 971
20. Maloney J M, Schreiber D S and DeVoe D L 2004 Large-force electrothermal linear micromotors J. Micromech. Microeng. 14 226
21. Lott C D, McLain T W, Harb J N and Howell L L 2002 Modeling the thermal behavior of a surface-micromachined linear-displacement thermomechanical microactuator Sensors Actuators A 101 239
22. Huang Q A and Lee N K S 1999 Analysis and design of polysilicon thermal flexure actuator J. Micromech. Microeng. 9 64
23. Serrano J R, Phinney L M and Kearney S P 2006 Micro-Raman thermometry of thermal flexure actuators J. Micromech. Microeng. 16 1128
24. Li L and Uttamchandani D 2004 Modified asymmetric micro-electrothermal actuator: analysis and experimentation J. Micromech. Microeng. 14 1734
25. Yan D, Khajepour A and Mansour R 2003 Modeling of two-hot-arm horizontal thermal actuator J. Micromech. Microeng. 13 312
26. Geisberger A A, Sarkar N, Ellis M and Skidmore G D 2003 Electrothermal properties and modeling of polysilicon microthermal actuators J. Microelectromech. Syst. 12 513
27. Kuang Y, Huang Q A and Lee N K S 2002 Numerical simulation of a polysilicon thermal flexure actuator Microsyst. Technol. 8 17
28. Zhang Y, Huang Q A, Li R G and Li W 2006 Macro-modeling for polysilicon cascaded bent beam electrothermal microactuators Sensors Actuators A 128 165
29. Li R G, Huang Q A and Li W H 2008 A nodal analysis method for simulating the behavior of electrothermal microactuators Microsyst. Technol. 14 119
30. Huang Q A, Xu G, Qi L and Li W 2006 A simple method for measuring the thermal diffusivity of surface-micromachined polysilicon thin films J. Micromech. Microeng. 16 981
31. Atre A 2006 Analysis of out-of-plane thermal microactuators J. Micromech. Microeng. 16 205
32. Solano B, Rolt S and Wood D 2008 Thermal and mechanical analysis of an SU8 polymeric actuator using infrared thermography Proc. I. Mech. E. Part C: J. Mech. Eng. Sci. 222 73
33. Feynman R P 1992 There's plenty of room at the bottom J. Microelectromech. Syst. 1 60