A two-beam method for extending the working range of electrostatic parallel-plate micro-actuators

Journal of Electrostatics

Volumn 65, Issue 4, 2007, Pages 256-262

  Qiao, Da Yong ^a   Yuan, Wei Zheng ^a   Li, Xiao Ying ^a  

^a NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

Author keywords

Electrostatic parallel plate actuator; Extended working range; MEMS; Nonlinear beam; Surface fabrication

Indexed keywords

BEAMS AND GIRDERS; COMPUTER SIMULATION; FABRICATION; MACHINE DESIGN; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; SPRINGS (COMPONENTS); SUSPENSIONS (COMPONENTS);

CONTROL CIRCUIT; EXTENDED WORKING RANGE; PARALLEL-PLATE ACTUATOR; SUSPENSION BEAM;

ELECTROSTATIC ACTUATORS;

BEAMS AND GIRDERS; COMPUTER SIMULATION; ELECTROSTATIC ACTUATORS; FABRICATION; MACHINE DESIGN; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; SPRINGS (COMPONENTS); SUSPENSIONS (COMPONENTS);

EID: 33846129397     PISSN: 03043886     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.elstat.2006.09.001     Document Type: Article

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