Extending displacements of comb drive actuators by adding secondary comb electrodes

Journal of Micromechanics and Microengineering

Volumn 16, Issue 4, 2006, Pages 684-691

  Hou, Max Ti Kuang ^a,c   Huang, Gordon Kou Wei ^b   Huang, Jing Yi ^b   Liao, Ke Min ^b   Chen, Rongshun ^b   Yeh, Jer Liang Andrew ^b  

^a CHINA INSTITUTE OF TECHNOLOGY   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^c NONE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SOFTWARE; ELECTRODES; SPRINGS (COMPONENTS); SUSPENSIONS (COMPONENTS);

COMB DRIVE ACTUATORS; ELECTROSTATIC SPRING CONSTANT; SECONDARY COMB ELECTRODES; SIMULATION SOFTWARE;

ACTUATORS;

EID: 33645092130     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/4/003     Document Type: Article

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