Development of AFM-based techniques to measure mechanical properties of nanoscale structures

Sensors and Actuators, A: Physical

Volumn 101, Issue 3, 2002, Pages 338-351

  Sundararajan, Sriram ^a   Bhushan, Bharat ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

Atomic force microscope; Bending strength; Elastic modulus; Fatigue; Fracture toughness; Nanomechanics; Silicon; SiO2

Indexed keywords

BEAMS AND GIRDERS; BENDING STRENGTH; ELASTIC MODULI; FATIGUE OF MATERIALS; FRACTURE TOUGHNESS; LOAD TESTING; MECHANICAL TESTING; NANOSTRUCTURED MATERIALS; SILICA;

NANOMECHANICS; QUASI-STATIC BENDING TEST TECHNIQUE; SILICON-BASED NANOSCALE STRUCTURES;

ATOMIC FORCE MICROSCOPY;

EID: 0037202396     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00268-6     Document Type: Article

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