Design and fabrication of a SU-8 based electrostatic microactuator

Microsystem Technologies

Volumn 13, Issue 3-4, 2007, Pages 271-277

  Dai, Wen ^a   Lian, Kun ^a   Wang, Wanjun ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; SILICON; ULTRAVIOLET RADIATION;

INTEGRATED STRUCTURE; SIDEWALL QUALITY; SILICON-BASED FABRICATION TECHNOLOGY; UV LITHOGRAPHY;

ELECTROSTATIC ACTUATORS;

EID: 33845736527     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0214-z     Document Type: Article

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