Parallel dip-pen nanolithography with arrays of individually addressable cantilevers

Applied Physics Letters

Volumn 84, Issue 5, 2004, Pages 789-791

  Bullen, David ^a   Chung, Sung Wook ^b   Wang, Xuefeng ^a   Zou, Jun ^a   Mirkin, Chad A ^b   Liu, Chang ^a  

^a Micro and Nanotechnology Laboratory   (United States)

^b NORTHWESTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIP-PEN NANOLITHOGRAPHY (DPN); SCANNING PROBE MICROSCOPY (SPM); THERMAL STRAIN;

ALGORITHMS; ANISOTROPY; ARRAYS; CATALYSTS; CHEMICAL VAPOR DEPOSITION; DEPOSITION; GOLD; OPTIMIZATION; OXIDATION; POLYMERS; PROBES; SILICON NITRIDE; SILICON WAFERS; THERMOMECHANICAL TREATMENT; THICKNESS MEASUREMENT; THIN FILMS;

NANOTECHNOLOGY;

EID: 1242331516     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1644317     Document Type: Article

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