FIB prepared TEM sample lift-out using MEMS grippers

Microscopy and Microanalysis

Volumn 10, Issue SUPPL. 2, 2004, Pages 1144-1145

  Tuck, Kimberly ^a   Ellis, Matt ^a   Geisberger, Aaron ^a   Skidmore, George ^a   Foster, Phil ^a  

^a ZYVEX CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4544326163     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/S1431927604882692     Document Type: Conference Paper

References (3)

1. th IEEE International Conference on MEMS, MEMS 2004, "Assembly Technology Across Multiple Length Scales from the Micro-Scale to the Nano-Scale" (2004) 588.
2. F. A. Stevie et. al, Surf. Interface Anal. 31 (2001) 345-351.
3. The authors would like to thank Tim Herlihy at University of Virginia, Materials Science and Engineering Department Charlottesville, VA for the FIB-cut samples.