Analytical model for analysis and design of V-shaped thermal microactuators

Journal of Microelectromechanical Systems

Volumn 14, Issue 4, 2005, Pages 788-798

  Enikov, Eniko T ^a   Kedar, Shantanu S ^a   Lazarov, Kalin V ^a  

^a University of Arizona   (United States)

Author keywords

Beam column theory; Buckling analysis; Thermal V shaped actuator

Indexed keywords

BUCKLING; FINITE ELEMENT METHOD; HEAT FLUX; HEAT LOSSES; HEAT TRANSFER; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; NONLINEAR EQUATIONS; THERMAL STRESS; THERMOELASTICITY;

BEAM-COLUMN THEORY; BUCKLING ANALYSIS; THERMAL MICROACTUATORS;

MICROACTUATORS;

EID: 27144500410     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.845449     Document Type: Article

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