Performance improvement of an electrothermal microactuator fabricated using Ni-diamond nanocomposite

Journal of Microelectromechanical Systems

Volumn 15, Issue 1, 2006, Pages 149-158

  Tsai, Li Nuan ^a   Shen, Guang Ren ^a   Cheng, Yu Ting ^a   Hsu, Wensyang ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; DIAMONDS; ELECTRODEPOSITION; NANOSTRUCTURED MATERIALS; NICKEL; SYNTHESIS (CHEMICAL);

ELECTROLYTIC NICKEL; ELECTROTHERMAL MICROACTUATORS; NANODIAMOND; NICKEL MATRIX;

MICROACTUATORS;

EID: 32244435385     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.863737     Document Type: Article

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