Simulation, measurement, and asymmetric buckling of thermal microactuators

Sensors and Actuators, A: Physical

Volumn 128, Issue 2, 2006, Pages 395-401

  Wittwer, Jonathan W ^a   Baker, Michael S ^a   Howell, Larry L ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b Department of Electrical and Computer Engineering   (United States)

Author keywords

Asymmetric buckling; MEMS simulation; Microforce measurement; Thermal microactuators

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; LOGIC DESIGN; MATHEMATICAL MODELS; MEASUREMENT THEORY;

ASYMMETRIC BUCKLING; MEMS SIMULATION; MICROFORCE MEASUREMENT; THERMAL MICROACTUATORS;

MICROACTUATORS;

EID: 33645984523     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.02.014     Document Type: Article

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