Design, fabrication, and testing of a 3-DOF HARM micromanipulator on (1 1 1) silicon substrate

Sensors and Actuators, A: Physical

Volumn 125, Issue 2, 2006, Pages 438-445

  Chang, Heng Chung ^a,b   Tsai, Julius Ming Lin ^a   Tsai, Hsin Chang ^a,b   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b DELTA ELECTRONICS INC   (Taiwan)

Author keywords

(1 1 1)Wafer; 3 DOF; Micro gripper; Micro robot arm; Micromanipulator

Indexed keywords

ACTUATORS; DEGREES OF FREEDOM (MECHANICS); GRIPPERS; MACHINE DESIGN; MICROPROCESSOR CHIPS; OPTICAL FIBERS; ROBOTIC ARMS; ROBOTS; SILICON WAFERS;

(1 1 1)WAFER; 3-DOF; MICRO GRIPPER; MICRO ROBOT ARMS;

MICROMANIPULATORS;

EID: 29144501489     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.06.013     Document Type: Article

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