Influence of deep RIE tolerances on comb-drive actuator performance

Journal of Physics D: Applied Physics

Volumn 40, Issue 4, 2007, Pages 970-976

  Chen, Bangtao ^a,b   Miao, Jianmin ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b INSTITUTE OF BIOENGINEERING AND NANOTECHNOLOGY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC FORCE; MICROSTRUCTURE; REACTIVE ION ETCHING; SILICON WAFERS;

COMB FINGERS; ETCHING TOLERANCE; SILICON ON GLASS (SOG) WAFER;

ACTUATORS;

EID: 33947681213     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/4/008     Document Type: Article

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