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Volumn 127, Issue 4, 2005, Pages 736-738

Mechanical design of compliant microsystems - A perspective and prospects

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Indexed keywords


EID: 23044457833     PISSN: 10500472     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1900150     Document Type: Editorial
Times cited : (54)

References (47)
  • 3
    • 0028699145 scopus 로고
    • "Design and Fabrication of Microelectromechanical Systems"
    • Kota, S., Ananthasuresh, G. K., Crary, S. B., and Wise, K. D., 1994, "Design and Fabrication of Microelectromechanical Systems," J. Mech. Des., 116(4), pp. 1081-1088.
    • (1994) J. Mech. Des. , vol.116 , Issue.4 , pp. 1081-1088
    • Kota, S.1    Ananthasuresh, G.K.2    Crary, S.B.3    Wise, K.D.4
  • 5
    • 85169875124 scopus 로고    scopus 로고
    • Multi-User MEMS Processes (MUMPs)
    • Multi-User MEMS Processes (MUMPs), 2005, http://www.memscap.com/memsrus/ crmumps.html.
    • (2005)
  • 8
    • 23044464425 scopus 로고    scopus 로고
    • "Cams in Microelectromechanical Systems"
    • edited by H. A. Rothbart, McGraw-Hill, New York, Chap. 15
    • Ananthasuresh, G. K., "Cams in Microelectromechanical Systems," in Cam Design Handbook, edited by H. A. Rothbart, McGraw-Hill, New York, Chap. 15, pp. 505-527.
    • Cam Design Handbook , pp. 505-527
    • Ananthasuresh, G.K.1
  • 11
    • 0346608292 scopus 로고    scopus 로고
    • "The Rise of Optical Switching"
    • Bishop, D. J., Giles, C. R., and Das, S. R., 2001, "The Rise of Optical Switching," Sci. Am., 284(1), pp. 88-92.
    • (2001) Sci. Am. , vol.284 , Issue.1 , pp. 88-92
    • Bishop, D.J.1    Giles, C.R.2    Das, S.R.3
  • 13
    • 0023409987 scopus 로고
    • "A Compliance Number Concept for Compliant Mechanisms, and Type Synthesis"
    • Her, I., and Midha, A., 1987, "A Compliance Number Concept for Compliant Mechanisms, and Type Synthesis," ASME J. Mech., Transm., Autom. Des., 109(3), pp. 348-355.
    • (1987) ASME J. Mech., Transm., Autom. Des. , vol.109 , Issue.3 , pp. 348-355
    • Her, I.1    Midha, A.2
  • 15
    • 4344672045 scopus 로고    scopus 로고
    • "Bistable Configurations of Compliant Mechanisms Modeled Using Four Links and Translational Joints"
    • Jensen, B. D., and Howell, L. L., 2004, "Bistable Configurations of Compliant Mechanisms Modeled Using Four Links and Translational Joints," J. Mech. Des. 126(4), pp. 657-666.
    • (2004) J. Mech. Des. , vol.126 , Issue.4 , pp. 657-666
    • Jensen, B.D.1    Howell, L.L.2
  • 16
    • 1042281175 scopus 로고    scopus 로고
    • "Identification of Compliant Pseudo-Rigid-Body Mechanism Configurations Resulting in Bistable Behavior"
    • Jensen, B. D., and Howell, L. L., 2003, "Identification of Compliant Pseudo-Rigid-Body Mechanism Configurations Resulting in Bistable Behavior," J. Mech. Des., 125(4), pp. 701-708.
    • (2003) J. Mech. Des. , vol.125 , Issue.4 , pp. 701-708
    • Jensen, B.D.1    Howell, L.L.2
  • 18
    • 0024767134 scopus 로고
    • "Resonant Micromotors: Historical Perspective and Analysis"
    • Pisano, A. P., 1989, "Resonant Micromotors: Historical Perspective and Analysis," Sens. Actuators, A, 20, pp. 83-89.
    • (1989) Sens. Actuators, A , vol.20 , pp. 83-89
    • Pisano, A.P.1
  • 20
    • 0026837614 scopus 로고
    • "Silicon-Processed Overhanging Microgripper"
    • Kim, C. J., Pisano, A., and Muller, R., 1992, "Silicon-Processed Overhanging Microgripper," J. Microelectromech. Syst., 1(1), pp. 31-36.
    • (1992) J. Microelectromech. Syst. , vol.1 , Issue.1 , pp. 31-36
    • Kim, C.J.1    Pisano, A.2    Muller, R.3
  • 21
    • 0030697635 scopus 로고    scopus 로고
    • "Hexsil Tweezers for Teleoperated Micro-Assembly"
    • Nagoya, Japan
    • Keller, C. G., and Howe, R. T., 1997, "Hexsil Tweezers for Teleoperated Micro-Assembly," Proc. IEEE Workshop on MEMS, Nagoya, Japan, pp. 72-77.
    • (1997) Proc. IEEE Workshop on MEMS , pp. 72-77
    • Keller, C.G.1    Howe, R.T.2
  • 22
    • 0036623899 scopus 로고    scopus 로고
    • "Design of a PZT Bimorph Actuator Using a Metamodel-Based Approach"
    • Cappelleri, D. J., Frecker, M. I., Simpson, T. W., and Snyder, A., 2002, "Design of a PZT Bimorph Actuator Using a Metamodel-Based Approach," J. Mech. Des., 124, 354-357.
    • (2002) J. Mech. Des. , vol.124 , pp. 354-357
    • Cappelleri, D.J.1    Frecker, M.I.2    Simpson, T.W.3    Snyder, A.4
  • 23
    • 14044278253 scopus 로고    scopus 로고
    • "Feasibility Study of a Fully Compliant Statically Balanced Laparoscopic Grasper"
    • DETC2004-57242, Salt Lake City, UT
    • Stapel, A., and Herder, J. L., 2004, "Feasibility Study of a Fully Compliant Statically Balanced Laparoscopic Grasper," ASME Design Engineering Technical Conferences, DETC2004-57242, Salt Lake City, UT.
    • (2004) ASME Design Engineering Technical Conferences
    • Stapel, A.1    Herder, J.L.2
  • 25
    • 4344594977 scopus 로고    scopus 로고
    • "A Novel Compliant Mechanism for Converting Reciprocating Translation into Enclosing Curved Paths"
    • Mankame, N., and Ananthasuresh, G. K., 2004, "A Novel Compliant Mechanism for Converting Reciprocating Translation into Enclosing Curved Paths," J. Mech. Des., 126(4), pp. 667-672.
    • (2004) J. Mech. Des. , vol.126 , Issue.4 , pp. 667-672
    • Mankame, N.1    Ananthasuresh, G.K.2
  • 27
    • 4344568127 scopus 로고    scopus 로고
    • "A Study of Displacement Distribution in a Piezoelectric Heterogeneous Bimorph"
    • Li, O., Lovell, M., Mei, J., and Clark, W., 2004, "A Study of Displacement Distribution in a Piezoelectric Heterogeneous Bimorph," J. Mech. Des., 126, pp. 757-762.
    • (2004) J. Mech. Des. , vol.126 , pp. 757-762
    • Li, O.1    Lovell, M.2    Mei, J.3    Clark, W.4
  • 28
    • 0034154878 scopus 로고    scopus 로고
    • "On an Optimal Property of Compliant Topologies"
    • Saxena, A., and Ananthasuresh, G. K., 2000, "On an Optimal Property of Compliant Topologies," Struct. Multidiscip. Optim., 19(1), pp. 36-49.
    • (2000) Struct. Multidiscip. Optim. , vol.19 , Issue.1 , pp. 36-49
    • Saxena, A.1    Ananthasuresh, G.K.2
  • 29
    • 7044227892 scopus 로고    scopus 로고
    • "On the Optimization of Compliant Force Amplifier Mechanisms for Surface Micromachined Resonant Accelerometers"
    • Pedersen, C. B., and Sechia, A. A., 2004, "On the Optimization of Compliant Force Amplifier Mechanisms for Surface Micromachined Resonant Accelerometers," J. Micromech. Microeng., 14, pp. 1281-1293.
    • (2004) J. Micromech. Microeng. , vol.14 , pp. 1281-1293
    • Pedersen, C.B.1    Sechia, A.A.2
  • 30
    • 0036155594 scopus 로고    scopus 로고
    • "Surface Micromachined Force Ganges: Uncertainty and Reliability"
    • Wittwer, J. W., Gomm, T., and Howell, L. L., 2002, "Surface Micromachined Force Ganges: Uncertainty and Reliability," J. Micromech. Microeng. 12(1), pp. 13-20.
    • (2002) J. Micromech. Microeng. , vol.12 , Issue.1 , pp. 13-20
    • Wittwer, J.W.1    Gomm, T.2    Howell, L.L.3
  • 31
    • 0035923335 scopus 로고    scopus 로고
    • "Vision-Based Sensing of Forces in Elastic Objects"
    • Wang, X., Ananthasuresh, G. K., and Ostrowski, J., 2001, "Vision-Based Sensing of Forces in Elastic Objects," Sens. Actuators, A, 94(3), pp. 142-156.
    • (2001) Sens. Actuators, A , vol.94 , Issue.3 , pp. 142-156
    • Wang, X.1    Ananthasuresh, G.K.2    Ostrowski, J.3
  • 32
    • 0038548000 scopus 로고    scopus 로고
    • "A Self-Retracting Fully-Compliant Bistable Micromechanism"
    • Masters, N. D., and Howell, L. L., 2003, "A Self-Retracting Fully-Compliant Bistable Micromechanism," J. Microelectromech. Syst., 12(3), pp. 273-280.
    • (2003) J. Microelectromech. Syst. , vol.12 , Issue.3 , pp. 273-280
    • Masters, N.D.1    Howell, L.L.2
  • 34
    • 3042742341 scopus 로고    scopus 로고
    • "1.51-GHz Nanocrystalline Diamond Micromechanical Disk Resonator with Material-Mismatched Isolating Support"
    • 2004, Maastricht, The Netherlands, 25-29 Jan
    • Wang, J., Butler, J. E., Feygelson, T., and Nguyen, C. T-C., 2004, "1.51-GHz Nanocrystalline Diamond Micromechanical Disk Resonator with Material-Mismatched Isolating Support," 2004, 17th IEEE MEMS Conference, Maastricht, The Netherlands, 25-29 Jan., pp. 641-644.
    • (2004) 17th IEEE MEMS Conference , pp. 641-644
    • Wang, J.1    Butler, J.E.2    Feygelson, T.3    Nguyen, C.T.-C.4
  • 35
    • 0038374162 scopus 로고    scopus 로고
    • "MEMS for Wireless Communications: 'From RF-MEMS Components to RF-MEMS-SiP'"
    • Tilmans, H. A. C., de Raedt, W., and Beyne, E., 2003, "MEMS for Wireless Communications: 'from RF-MEMS Components to RF-MEMS-SiP'," J. Micromech. Microeng., 13, pp. S139-S163.
    • (2003) J. Micromech. Microeng. , vol.13
    • Tilmans, H.A.C.1    de Raedt, W.2    Beyne, E.3
  • 36
    • 0029272418 scopus 로고
    • "Parametric Deflection Approximations for End-Loaded, Large-Deflection Beams in Compliant Mechanisms"
    • Howell, L. L., and Midha, A., 1995, "Parametric Deflection Approximations for End-Loaded, Large-Deflection Beams in Compliant Mechanisms," J. Mech. Des., 117, pp. 156-165.
    • (1995) J. Mech. Des. , vol.117 , pp. 156-165
    • Howell, L.L.1    Midha, A.2
  • 37
    • 0036773147 scopus 로고    scopus 로고
    • "On-Chip Actuation of an In-Plane Compliant Bistable Micro-Mechanism"
    • Baker, M. S., and Howell, L. L., 2002, "On-Chip Actuation of an In-Plane Compliant Bistable Micro-Mechanism," J. Microelectromech. Syst., 11(5), pp. 566-573.
    • (2002) J. Microelectromech. Syst. , vol.11 , Issue.5 , pp. 566-573
    • Baker, M.S.1    Howell, L.L.2
  • 40
    • 0037530468 scopus 로고    scopus 로고
    • "Freeform Skeletal Shape Optimization of Compliant Mechanisms"
    • Xu, D., and Ananthasuresh, G. K., 2003, "Freeform Skeletal Shape Optimization of Compliant Mechanisms," J. Mech. Des., 125, pp. 253-261.
    • (2003) J. Mech. Des. , vol.125 , pp. 253-261
    • Xu, D.1    Ananthasuresh, G.K.2
  • 41
    • 0032022531 scopus 로고    scopus 로고
    • "Optimal shape design of an electrostatic comb drive in microelectromech, systems"
    • Ye, W., Mukherjee, S., and MacDonald, N. C., 1998, "Optimal shape design of an electrostatic comb drive in microelectromech, systems," J. Microelectromech. Syst. 7(1), pp. 16-26.
    • (1998) J. Microelectromech. Syst. , vol.7 , Issue.1 , pp. 16-26
    • Ye, W.1    Mukherjee, S.2    MacDonald, N.C.3
  • 43
    • 0035341460 scopus 로고    scopus 로고
    • "Design and Manufacture of Electro-Thermal-Compliant Micro Devices"
    • Moulton, T., and Ananthasuresh, G. K., 2001, "Design and Manufacture of Electro-Thermal-Compliant Micro Devices," Sens. Actuators, A, 90, pp. 38-48.
    • (2001) Sens. Actuators, A , vol.90 , pp. 38-48
    • Moulton, T.1    Ananthasuresh, G.K.2
  • 44
    • 0035850702 scopus 로고    scopus 로고
    • "Design of Multi-Physics Actuators Using Topology Optimization - Part I: One Material Structures"
    • Sigmund, O., 2001, "Design of Multi-Physics Actuators Using Topology Optimization - Part I: One Material Structures," Comput. Methods Appl. Mech. Eng., 190(49-50), pp. 6577-6604.
    • (2001) Comput. Methods Appl. Mech. Eng. , vol.190 , Issue.49-50 , pp. 6577-6604
    • Sigmund, O.1
  • 45
    • 0036544395 scopus 로고    scopus 로고
    • "Novel Design Technique for Electro-Thermally Actuated Compliant Micromechanisms"
    • Yin, L., and Ananthasuresh, G. K., 2002, "Novel Design Technique for Electro-Thermally Actuated Compliant Micromechanisms," Sens. Actuators, A, 97-98, pp. 599-609.
    • (2002) Sens. Actuators, A , vol.97-98 , pp. 599-609
    • Yin, L.1    Ananthasuresh, G.K.2
  • 46
    • 0004001123 scopus 로고    scopus 로고
    • MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes
    • SAND2000-0091, Sandia National Laboratories Report, Albuquerque, NM
    • Tanner et al., 2000, MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes, SAND2000-0091, Sandia National Laboratories Report, Albuquerque, NM.
    • (2000)
    • Tanner, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.