Design of contoured microscale thermomechanical actuators

Journal of Microelectromechanical Systems

Volumn 15, Issue 5, 2006, Pages 1226-1234

  Chen, Shih Chen ^a   Culpepper, Martin L ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

Contoured beam; Microactuator; Nanopositioner; Thermomechanical actuator

Indexed keywords

CONTOURED BEAM; NANOPOSITIONER; THERMOMECHANICAL ACTUATOR;

MATHEMATICAL MODELS; OPTIMIZATION; STIFFNESS; STRAIN;

MICROACTUATORS;

EID: 33750015358     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.879692     Document Type: Article

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