A critical literature review of focused electron beam induced deposition

Journal of Applied Physics

Volumn 104, Issue 8, 2008, Pages

  Van Dorp, W F ^a   Hagen, C W ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; DECOMPOSITION; DEPOSITION; DISSOCIATION; ELECTRON BEAMS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON GUNS; ELECTRON OPTICS; EXPERIMENTS; MODELS; PARTICLE BEAMS; PYROLYSIS; SECONDARY EMISSION;

ACCELERATION VOLTAGES; COMBINING MODELS; COMPLEX PROCESSES; CROSS SECTIONS; DEPENDENT FACTORS; DISSOCIATION MECHANISMS; ELECTRON INDUCED DISSOCIATIONS; EXPERIMENTAL SET-UP; FOCUSED ELECTRON BEAM INDUCED DEPOSITIONS; GROWTH REGIMES; INDUCED DEPOSITIONS; INDUCED HEATING; KEY FACTORS; LITERATURE REVIEWS; NANOFABRICATION TECHNIQUES; PHYSICAL DIMENSIONS; PHYSICAL PROCESSES; PRIMARY ELECTRONS; SCAN PATTERNS; SECONDARY ELECTRON YIELDS; SECONDARY ELECTRONS; STOICHIOMETRIC COMPOSITIONS; THERMAL DECOMPOSITIONS; VERTICAL GROWTHS;

ELECTRONS;

EID: 55249089714     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2977587     Document Type: Article

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