Two-dimensional photonic crystals produced by additive nanolithography with electron beam-induced deposition act as filters in the infrared

Microelectronic Engineering

Volumn 57-58, Issue , 2001, Pages 995-1001

  Koops, H W P ^a   Hoinkis, O E ^a   Honsberg, M E W ^a   Schmidt, R ^a   Blum, R ^a   Bottger G ^a   Kuligk, A ^a   Liguda, C ^a   Eich, M ^a  

^a T Nova DTI mbH   (Germany)

Author keywords

Additive nanolithography; Electron beam induced deposition; Nanocrystalline deposited material; Photonic crystals; WDM filter

Indexed keywords

DEPOSITION; ELECTRON BEAMS; NANOSTRUCTURED MATERIALS; OPTICAL FILTERS; PHOTONS; REFRACTIVE INDEX; SILICA; WAVELENGTH DIVISION MULTIPLEXING;

PHOTONIC CRYSTALS;

NANOTECHNOLOGY;

EID: 0035450080     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00565-2     Document Type: Article

References (15)

1. Optical properties of nanocrystalline InP in opal 3-dimensional gratings
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6. Characterization and application of materials grown by electron beam induced deposition
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8. Photonic crystals
9. Fabrication of 3D photonic crystals by autocloning and its applications
10. Superprism phenomena in photonic crystals: Toward microscale lightwave circuits
11. Photonic crystals built by three-dimensional additive lithography enable integrated optics of high density
12. Determination of the refractive index of photonic crystal material from scattering measurements
13. Absolute photonic band gap in a two-dimensional square lattice of square dielectric rods in air