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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 4105-4109

Conductive dots, wires, and supertips for field electron emitters produced by electron-beam induced deposition on samples having increased temperature

(4) Koops, H W P a Schossler C b Kaya, A b Weber, M c

a DEUTSCHE TELEKOM LABORATORIES (Germany)

b DARMSTADT UNIVERSITY OF TECHNOLOGY (Germany)

c HAHN MEITNER INSTITUT (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL SYSTEMS; DEPOSITION; ELECTRIC PROPERTIES; ELECTRON BEAMS; ELECTRON EMISSION; NANOSTRUCTURED MATERIALS; ORGANOMETALLICS; RESISTORS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR QUANTUM DOTS; VACUUM;

ADDITIVE LITHOGRAPHY; CONDUCTIVE TIPS; ELECTRON BEAM INDUCED DEPOSITION; FIELD EMITTER TIPS; IMAGE PROCESSOR BEAM CONTROL SYSTEM; POOLE-FRENKEL PLOTS;

LITHOGRAPHY;

EID: 0030289164 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.588600 Document Type: Article

Times cited : (130)

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