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Volumn 41, Issue 9, 2006, Pages 2667-2671

Formation of iron silicide nano-islands on Si substrates by metal organic chemical vapor deposition under electron beams

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; IRON COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SILICON; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

IRON SILICIDE; NANOISLANDS; VACUUM TRANSMISSION ELECTRON MICROSCOPES;

NANOSTRUCTURED MATERIALS;

EID: 33744734390 PISSN: 00222461 EISSN: 15734803 Source Type: Journal
DOI: 10.1007/s10853-006-7868-x Document Type: Conference Paper

Times cited : (8)

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