Effects of heat generation during electron-beam-induced deposition of nanostructures

Journal of Applied Physics

Volumn 97, Issue 12, 2005, Pages

  Randolph, S J ^a   Fowlkes, J D ^a   Rack, P D ^a  

^a University of Tennessee Knoxville   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM CURRENT; BEAM ENERGY; ELECTRON-BEAM-INDUCED DEPOSITION (EBID); GROWTH RATE;

ELECTRODEPOSITION; ELECTRON BEAMS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MONTE CARLO METHODS; SILICA; TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

NANOSTRUCTURED MATERIALS;

EID: 21644458767     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1942627     Document Type: Article

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