Features of self-supporting tungsten nanowire deposited with high-energy electrons

Journal of Applied Physics

Volumn 96, Issue 1, 2004, Pages 619-623

  Liu, Z Q ^a   Mitsuishi, K ^a   Furuya, K ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH; DEPOSITION; DISSOCIATION; ELECTRON BEAMS; ELECTRON SCATTERING; MORPHOLOGY; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN;

ELECTRON BEAM INDUCED DEPOSITION (EBID); SCANNING TRANSMISSION ELECTRON MICROSCOPES (STEM); SELF SUPPORTING NANOWIRES; TUNGSTEN NANOWIRES;

NANOSTRUCTURED MATERIALS;

EID: 3142753060     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1755434     Document Type: Article

References (21)

1. A. E. Ennos, Br. J. Appl. Phys. 4, 101 (1953).
2. S. Matsui and K. Mori, Jpn. J. Appl. Phys., Part 2 23, L706 (1984).
3. H. W. P. Koops, R. Weiel, D. P. Kem, and T. H. Baum, J. Vac. Sci. Technol. B 6, 477 (1988).
4. R. R. Kunz, T. E. Allen, and T. M. Mayer, J. Vac. Sci. Technol. B 5, 1427 (1987).
5. K. L. Lee, M. Hatzakis, J. Vac. Sci. Technol. B 7, 1941 (1989).
6. H. W. P. Koops, J. Kretz, M. Rudolph, M. Weber, G. Dahm, and K. L. Lee, Jpn. J. Appl. Phys. 33, 7099 (1994).
7. Y. Akama, E. Nishimura, and A. Sakai, J. Vac. Sci. Technol. A 8, 429 (1990).
8. M. Weber, H. W. P. Koops, M. Rudolph, J. Kretz, and G. Schmidt, J. Vac. Sci. Technol. B 13, 1364 (1995).
9. O. Yavas, C. Ochiai, and M. Takai, Appl. Phys. Lett. 76, 3319 (2000).
10. Y. M. Lau, P. C. Chee, J. T. L. Thong, and V. Ng, J. Vac. Sci. Technol. A 20, 1295 (2002).
11. T. E. Allen, R. R. Kunz, and T. M. Mayer, J. Vac. Sci. Technol. B 6, 2057 (1988).
12. N. Silvis-Cividjian, C. W. Hagen, L. H. A. Leunissen, and P. Kruit, Mi-croelectron. Eng. 61-62, 693 (2002).
13. V. V. Aristov et al., Nanotechnology 6, 35 (1995).
14. S. Matsui and T. Ichihashi, Appl. Phys. Lett. 53, 842 (1988).
15. T. Ichihashi and S. Matsui, J. Vac. Sci. Technol. B 6, 1869 (1988).
16. K. Mitsuishi, M. Shimojo, M. Han, and K. Furuya, Appl. Phys. Lett. 83, 2064 (2003).
17. N. Silvis-Cividjian, C. W. Hagen, P. Kruit, M. A. J. v.d. Stam, and H. B. Groen, Appl. Phys. Lett. 82, 3514 (2003).
18. K. T. Kohlmann-von Platen, J. Chlebek, M. Weiss, K. Reimer, H. Oertel, and W. H. Brünger, J. Vac. Sci. Technol. B 11, 2219 (1993).
19. K. I. Schiffmann, Nanotechnology 4, 163 (1993).
20. T. Ichihashi and S. Matsui, J. Vac. Sci. Technol. B 6, 1869 (1988).
21. T. J. Stark, T. M. Mayer, D. P. Griffis, and P. E. Russell, J. Vac. Sci. Technol. B 10, 2685 (1992).