Fabrication and actuation of customized nanotweezers with a 25 nm gap

Nanotechnology

Volumn 12, Issue 3, 2001, Pages 331-335

  Boggild P ^a   Hansen, T M ^a   Tanasa, C ^b   Grey, F ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CONTAMINATION; ELECTRIC POTENTIAL; ELECTRIC VARIABLES MEASUREMENT; ELECTRODES; ELECTRON BEAMS; ENERGY GAP; NANOTECHNOLOGY; PARTICLES (PARTICULATE MATTER); SILICA; SUBSTRATES;

DIRECT ELECTRICAL MEASUREMENT; NANOTWEEZERS; SILICON MICROFABRICATION; SILICON OXIDE CANTILEVER; THREE-DIMENSIONAL GROWTH;

NANOSTRUCTURED MATERIALS;

EID: 0035443572     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/12/3/322     Document Type: Conference Paper

References (18)