Visualization and in situ contacting of carbon nanotubes in a scanning electron microscope

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 2789-2792

  Croitoru, M D ^a   Bertsche, G ^a   Kern, D P ^a   Burkhardt, C ^a   Bauerdick, S ^a   Sahakalkan S ^b   Roth, S ^b  

^a UNIVERSITY OF TÜBINGEN   (Germany)

^b MAX PLANCK INSTITUT FÜR FESTKÖRPERFORSCHUNG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRIC POTENTIAL; INSULATING MATERIALS; ORGANOMETALLICS; SCANNING ELECTRON MICROSCOPY; TUNGSTEN COMPOUNDS; VISUALIZATION;

BEAM ENERGIES; IN SITU CONTACTING; METALORGANIC PRECURSORS; TUNGSTEN HEXACARBONYL;

CARBON NANOTUBES;

EID: 29044442172     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2130350     Document Type: Article

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