Nanolaboratory - A prototype nanomanufacturing system

Proceedings of the World Congress on Intelligent Control and Automation (WCICA)

Volumn 3, Issue , 2004, Pages 2698-2701

  Fukuda, Toshio ^a   Arai, Fumihito ^a   Dong, Lixin ^a   Nakajima, Masahiro ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Carbon nanotube; Electron beam induced deposition; Nanodevice; Nanolaboratory; Nanorobotic manipulation

Indexed keywords

ELECTRON-BEAM-INDUCED DEPOSITION; NANODEVICES; NANOLABORATORY; NANOROBOTIC MANIPULATION;

ATOMIC FORCE MICROSCOPY; COLD CATHODE TUBES; COMPUTER AIDED MANUFACTURING; ELECTRON BEAMS; ELECTRON SOURCES; NANOTECHNOLOGY; REAL TIME SYSTEMS; SCANNING ELECTRON MICROSCOPY; SOFTWARE PROTOTYPING; THERMOANALYSIS;

CARBON NANOTUBES;

EID: 4444361770     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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