Electron-beam induced initial growth of platinum films using Pt(PF 3) 4

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 4, 2004, Pages 1803-1806

  Wang, S ^a   Sun, Y M ^a   Wang, Q ^a   White, J M ^a  

^a The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

E-BEAM FLUX; ELECTRON BEAM INDUCED DEPOSITION (EBID); ELECTRONIC EXCITATION; ORGANOMETALLIC PRECURSORS;

AUGER ELECTRON SPECTROSCOPY; COMPOSITION; CURRENT DENSITY; ELECTRON BEAMS; ELECTRON IRRADIATION; FILM GROWTH; ORGANOMETALLICS; OXIDATION; OXYGEN; PHOSPHORUS; PLATINUM; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THERMAL EFFECTS; THIN FILMS; VACUUM;

METALLIC FILMS;

EID: 4944237530     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1761266     Document Type: Article

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