A dynamic Monte Carlo study of the in situ growth of a substance deposited using electron-beam-induced deposition

Nanotechnology

Volumn 17, Issue 15, 2006, Pages 3832-3837

  Liu, Zhi Quan ^a   Mitsuishi, Kazutaka ^a   Furuya, Kazuo ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DEPOSITION; ELECTRON BEAMS; ELECTRON ENERGY LEVELS; ELECTRON SCATTERING; MONTE CARLO METHODS; PARTICLE SIZE ANALYSIS;

IN SITU GROWTH; LIGHT ATOMS; PROBE SIZE; SUBSTRATE THICKNESS;

GROWTH (MATERIALS);

EID: 33748906876     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/17/15/038     Document Type: Article

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