Electrodes for carbon nanotube devices by focused electron beam induced deposition of gold

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 3174-3177

  Brintlinger, T ^a   Fuhrer, M S ^a   Melngailis, J ^b   Utke, I ^c   Bret, T ^d   Perentes, A ^d   Hoffmann, P ^d   Abourida, M ^e   Doppelt, P ^e  

^a University of Maryland   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

^c SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^d EPFL   (Switzerland)

^e Centre d'Etude de Chimie tallurgique (CNRS)   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DEVICE FABRICATION; FOCUSED ELECTRON BEAMS; PRECURSOR GASES; SINGLE-WALLED CARBON NANOTUBES (SWNT);

CHEMICAL VAPOR DEPOSITION; DEPOSITION; ELECTRIC CONTACTS; ELECTRODES; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; GOLD;

CARBON NANOTUBES;

EID: 29044443037     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2130355     Document Type: Article

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