Characterization of focused electron beam induced carbon deposits from organic precursors

Microelectronic Engineering

Volumn 78-79, Issue 1-4, 2005, Pages 300-306

  Bret, Tristan ^a   Mauron, Sebastien ^a   Utke, Ivo ^a   Hoffmann, Patrik ^a  

^a EPFL   (Switzerland)

Author keywords

Amorphous carbon; Focused electron beam induced deposition; Micro and nanostructures; Micro FTIR; Micro Raman

Indexed keywords

AMORPHOUS MATERIALS; CARBON; CARBOXYLIC ACIDS; ENERGY DISPERSIVE SPECTROSCOPY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; NANOSTRUCTURED MATERIALS; OPTICAL SENSORS; SCANNING ELECTRON MICROSCOPY; STYRENE;

FOCUSED ELECTRON BEAM INDUCED DEPOSITION; MICRO- AND NANOSTRUCTURES; MICRO-FTIR; MICRO-RAMAN;

ELECTRON BEAMS;

EID: 14944338761     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2005.01.006     Document Type: Conference Paper

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