Cross section investigations of compositions and sub-structures of tips obtained by focused electron beam induced deposition

Advanced Engineering Materials

Volumn 7, Issue 5, 2005, Pages 323-331

  Utke, Ivo ^a   Michler, Johann ^a   Gasser, Philippe ^a   Santschi, Christian ^b   Laub, Daniel ^b   Canton, Marco ^b   Buffat, Philippe A ^b   Jiao, Ciao ^c   Hoffmann, Patrik ^b  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^b EPFL   (Switzerland)

^c FEI UK Limited   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; BACKSCATTERING; COMPOSITION; NANOSTRUCTURED MATERIALS; PARTIAL PRESSURE; POLYCRYSTALS; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; X RAY SPECTROSCOPY;

ELECTRON BEAM HEATING; FOCUSED ELECTRON BEAM (FEB); FOCUSED ION BEAM MILLING; MAGNETIC FORCE MICROSCOPY;

ELECTRON BEAMS;

EID: 20444468507     PISSN: 14381656     EISSN: None     Source Type: Journal    
DOI: 10.1002/adem.200500061     Document Type: Article

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